Abstract
A method to measure built-in voltages on the material interfaces in
capacitive MEMS-devices inside closed cavities is presented. The method is
based on a vibrating capacitor (Kelvin-probe) principle and it can even be
used to measure closed cavity samples. The suggested set-up is tested by
measuring various capacitive accelerometers and the results are compared with
those obtained from capacitance-voltage (C-V) measurements. The potential of
the method for high-speed measurements is explored by demonstrating an
accurate determination of built-in voltages by measuring only a few data
points for a device due to a very highly linear response of the method.
| Original language | English |
|---|---|
| Pages (from-to) | 5558-5563 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 40 |
| Issue number | 18 |
| DOIs | |
| Publication status | Published - 2007 |
| MoE publication type | A1 Journal article-refereed |
Keywords
- MEMS
- MEMS-devices
- Kelvin-probe
- cavity spaces
- built-in voltage
- CPD
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