Keyphrases
Accurate Determination
33%
Built-in Voltage
100%
Capacitance-voltage Measurements
33%
Capacitive Accelerometer
33%
Capacitive MEMS
33%
Closed Cavity
100%
Fast Measurement
100%
High-speed Measurement
33%
Highly Linear
33%
Kelvin Probe
33%
Linear Response
33%
Material Interfaces
33%
MEMS Devices
100%
Vibrating Capacitor
33%
INIS
accelerometers
25%
capacitance
25%
capacitors
25%
cavities
100%
comparative evaluations
25%
data
25%
devices
100%
interfaces
25%
probes
25%
speed
25%
voltage
100%
Engineering
Capacitive
50%
Data Point
50%
Electrical Measurement
50%
Linear Response
50%
Material Interface
50%
Microelectromechanical System
100%
Chemical Engineering
Microelectromechanical System
100%
Voltage Measurement
50%