Method of manufacturing laterally coupled BAW thin films

Johanna Meltaus (Inventor), Tuomas Pensala (Inventor), Markku Ylilammi (Inventor), Tommi Riekkinen (Inventor), Tomi Mattila (Inventor)

Research output: PatentPatent

Abstract

The invention describes a manufacturing method for an acoustic balanced-unbalanced (balun) or balanced-balanced thin-film BAW filter based on lateral acoustic coupling. In laterally acoustically coupled thin-film BAW filters (LBAW) one can realize transformation from unbalanced to balanced electric signal if the electrodes of the balanced port are placed on the opposite sides of the piezoelectric film. The manufacturing process is simpler than in the corresponding component based on vertical acoustical coupling. The device can also realize impedance transformation.

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Original languageEnglish
Patent numberUS2012086523
IPCH01L 41/ 22 A I
Priority date13/10/11
Publication statusPublished - 12 Apr 2012
MoE publication typeH1 Granted patent

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