Method of manufacturing laterally coupled BAW thin films

Johanna Meltaus; Tuomas Pensala; Markku Ylilammi; Tommi Riekkinen; Tomi Mattila

Method of manufacturing laterally coupled BAW thin films

Johanna Meltaus (Inventor), Tuomas Pensala (Inventor), Markku Ylilammi (Inventor), Tommi Riekkinen (Inventor), Tomi Mattila (Inventor)

Research output: Patent › Patent

Abstract

The invention describes a manufacturing method for an acoustic balanced-unbalanced (balun) or balanced-balanced thin-film BAW filter based on lateral acoustic coupling. In laterally acoustically coupled thin-film BAW filters (LBAW) one can realize transformation from unbalanced to balanced electric signal if the electrodes of the balanced port are placed on the opposite sides of the piezoelectric film. The manufacturing process is simpler than in the corresponding component based on vertical acoustical coupling. The device can also realize impedance transformation.

Patent family as of 29.12.2021
CN103222191 A 20130724 CN201180049857 20111014
CN108988819 A 20181211 CN201810521377 20111014
EP2628246 A1 20130821 EP20110832194 20111014
EP2628246 A4 20140618 EP20110832194 20111014
FI121722 B 20110315 FI20060000832 20060918
FI20060832 A 20080319 FI20060000832 20060918
FI20060832 A0 20060918 FI20060000832 20060918
FI20106059 A 20120415 FI20100006059 20101014
FI20106059 A0 20101014 FI20100006059 20101014
FI20106060 A 20120415 FI20100006060 20101014
FI20106060 A0 20101014 FI20100006060 20101014
FI20106063 A 20120608 FI20100006063 20101014
FI20106063 A0 20101014 FI20100006063 20101014
JP2013539946 T2 20131028 JP20130533251T 20111014
JP5926735 B2 20160525 JP20130533251T 20111014
US2010067167 AA 20100318 US20070440743 20070914
US8950057 BB 20150210 US20070440743 20070914
US2012086523 AA 20120412 US20110272390 20111013
US8925163 BB 20150106 US20110272390 20111013
US2013278356 AA 20131024 US20110879028 20111014
US9893712 BB 20180213 US20110879028 20111014
US10778186 BB 20200915 US20180893717 20180212
US2018212589 AA 20180726 US20180893717 20180212
US2021058066 AA 20210225 US20200008077 20200831
WO08034940 A1 20080327 WO2007FI00232 20070914
WO12049372 A1 20120419 WO2011FI50891 20111014
WO12049373 A1 20120419 WO2011FI50893 20111014
WO12049374 A1 20120419 WO2011FI50895 20111014

Link to current patent family on right

Original language	English
Patent number	US2012086523
IPC	H01L 41/ 22 A I
Priority date	13/10/11
Publication status	Published - 12 Apr 2012
MoE publication type	H1 Granted patent

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title = "Method of manufacturing laterally coupled BAW thin films",

abstract = "The invention describes a manufacturing method for an acoustic balanced-unbalanced (balun) or balanced-balanced thin-film BAW filter based on lateral acoustic coupling. In laterally acoustically coupled thin-film BAW filters (LBAW) one can realize transformation from unbalanced to balanced electric signal if the electrodes of the balanced port are placed on the opposite sides of the piezoelectric film. The manufacturing process is simpler than in the corresponding component based on vertical acoustical coupling. The device can also realize impedance transformation.Patent family as of 29.12.2021CN103222191 A 20130724 CN201180049857 20111014 CN108988819 A 20181211 CN201810521377 20111014 EP2628246 A1 20130821 EP20110832194 20111014 EP2628246 A4 20140618 EP20110832194 20111014 FI121722 B 20110315 FI20060000832 20060918 FI20060832 A 20080319 FI20060000832 20060918 FI20060832 A0 20060918 FI20060000832 20060918 FI20106059 A 20120415 FI20100006059 20101014 FI20106059 A0 20101014 FI20100006059 20101014 FI20106060 A 20120415 FI20100006060 20101014 FI20106060 A0 20101014 FI20100006060 20101014 FI20106063 A 20120608 FI20100006063 20101014 FI20106063 A0 20101014 FI20100006063 20101014 JP2013539946 T2 20131028 JP20130533251T 20111014 JP5926735 B2 20160525 JP20130533251T 20111014 US2010067167 AA 20100318 US20070440743 20070914 US8950057 BB 20150210 US20070440743 20070914 US2012086523 AA 20120412 US20110272390 20111013 US8925163 BB 20150106 US20110272390 20111013 US2013278356 AA 20131024 US20110879028 20111014 US9893712 BB 20180213 US20110879028 20111014 US10778186 BB 20200915 US20180893717 20180212 US2018212589 AA 20180726 US20180893717 20180212 US2021058066 AA 20210225 US20200008077 20200831 WO08034940 A1 20080327 WO2007FI00232 20070914 WO12049372 A1 20120419 WO2011FI50891 20111014 WO12049373 A1 20120419 WO2011FI50893 20111014 WO12049374 A1 20120419 WO2011FI50895 20111014Link to current patent family on right ",

author = "Johanna Meltaus and Tuomas Pensala and Markku Ylilammi and Tommi Riekkinen and Tomi Mattila",

year = "2012",

month = apr,

day = "12",

language = "English",

type = "Patent",

note = "US2012086523; H01L 41/ 22 A I",

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TY - PAT

T1 - Method of manufacturing laterally coupled BAW thin films

AU - Meltaus, Johanna

AU - Pensala, Tuomas

AU - Ylilammi, Markku

AU - Riekkinen, Tommi

AU - Mattila, Tomi

PY - 2012/4/12

Y1 - 2012/4/12

N2 - The invention describes a manufacturing method for an acoustic balanced-unbalanced (balun) or balanced-balanced thin-film BAW filter based on lateral acoustic coupling. In laterally acoustically coupled thin-film BAW filters (LBAW) one can realize transformation from unbalanced to balanced electric signal if the electrodes of the balanced port are placed on the opposite sides of the piezoelectric film. The manufacturing process is simpler than in the corresponding component based on vertical acoustical coupling. The device can also realize impedance transformation.Patent family as of 29.12.2021CN103222191 A 20130724 CN201180049857 20111014 CN108988819 A 20181211 CN201810521377 20111014 EP2628246 A1 20130821 EP20110832194 20111014 EP2628246 A4 20140618 EP20110832194 20111014 FI121722 B 20110315 FI20060000832 20060918 FI20060832 A 20080319 FI20060000832 20060918 FI20060832 A0 20060918 FI20060000832 20060918 FI20106059 A 20120415 FI20100006059 20101014 FI20106059 A0 20101014 FI20100006059 20101014 FI20106060 A 20120415 FI20100006060 20101014 FI20106060 A0 20101014 FI20100006060 20101014 FI20106063 A 20120608 FI20100006063 20101014 FI20106063 A0 20101014 FI20100006063 20101014 JP2013539946 T2 20131028 JP20130533251T 20111014 JP5926735 B2 20160525 JP20130533251T 20111014 US2010067167 AA 20100318 US20070440743 20070914 US8950057 BB 20150210 US20070440743 20070914 US2012086523 AA 20120412 US20110272390 20111013 US8925163 BB 20150106 US20110272390 20111013 US2013278356 AA 20131024 US20110879028 20111014 US9893712 BB 20180213 US20110879028 20111014 US10778186 BB 20200915 US20180893717 20180212 US2018212589 AA 20180726 US20180893717 20180212 US2021058066 AA 20210225 US20200008077 20200831 WO08034940 A1 20080327 WO2007FI00232 20070914 WO12049372 A1 20120419 WO2011FI50891 20111014 WO12049373 A1 20120419 WO2011FI50893 20111014 WO12049374 A1 20120419 WO2011FI50895 20111014Link to current patent family on right

AB - The invention describes a manufacturing method for an acoustic balanced-unbalanced (balun) or balanced-balanced thin-film BAW filter based on lateral acoustic coupling. In laterally acoustically coupled thin-film BAW filters (LBAW) one can realize transformation from unbalanced to balanced electric signal if the electrodes of the balanced port are placed on the opposite sides of the piezoelectric film. The manufacturing process is simpler than in the corresponding component based on vertical acoustical coupling. The device can also realize impedance transformation.Patent family as of 29.12.2021CN103222191 A 20130724 CN201180049857 20111014 CN108988819 A 20181211 CN201810521377 20111014 EP2628246 A1 20130821 EP20110832194 20111014 EP2628246 A4 20140618 EP20110832194 20111014 FI121722 B 20110315 FI20060000832 20060918 FI20060832 A 20080319 FI20060000832 20060918 FI20060832 A0 20060918 FI20060000832 20060918 FI20106059 A 20120415 FI20100006059 20101014 FI20106059 A0 20101014 FI20100006059 20101014 FI20106060 A 20120415 FI20100006060 20101014 FI20106060 A0 20101014 FI20100006060 20101014 FI20106063 A 20120608 FI20100006063 20101014 FI20106063 A0 20101014 FI20100006063 20101014 JP2013539946 T2 20131028 JP20130533251T 20111014 JP5926735 B2 20160525 JP20130533251T 20111014 US2010067167 AA 20100318 US20070440743 20070914 US8950057 BB 20150210 US20070440743 20070914 US2012086523 AA 20120412 US20110272390 20111013 US8925163 BB 20150106 US20110272390 20111013 US2013278356 AA 20131024 US20110879028 20111014 US9893712 BB 20180213 US20110879028 20111014 US10778186 BB 20200915 US20180893717 20180212 US2018212589 AA 20180726 US20180893717 20180212 US2021058066 AA 20210225 US20200008077 20200831 WO08034940 A1 20080327 WO2007FI00232 20070914 WO12049372 A1 20120419 WO2011FI50891 20111014 WO12049373 A1 20120419 WO2011FI50893 20111014 WO12049374 A1 20120419 WO2011FI50895 20111014Link to current patent family on right

UR - https://worldwide.espacenet.com/patent/search/family/045924683/publication/US8925163B2?q=US8925163

M3 - Patent

M1 - US2012086523

ER -

Method of manufacturing laterally coupled BAW thin films

Abstract

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