Micro and nanotechnologies for photonic and electronic applications

Harri Kopola, Hannu Kattelus, Jorma Lammasniemi

Research output: Contribution to conferenceConference articleScientificpeer-review

Original languageEnglish
Number of pages10
Publication statusPublished - 2004
MoE publication typeNot Eligible
EventInternational Workshop on Micromechatronics and Micro and Nano Fabrication - Karlsruhe, Germany
Duration: 5 Oct 20046 Oct 2004

Conference

ConferenceInternational Workshop on Micromechatronics and Micro and Nano Fabrication
CountryGermany
CityKarlsruhe
Period5/10/046/10/04

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