Micro and nanotechnologies for photonic and electronic applications

Harri Kopola; Hannu Kattelus; Jorma Lammasniemi

Micro and nanotechnologies for photonic and electronic applications

Harri Kopola
, Hannu Kattelus
, Jorma Lammasniemi

Research output: Contribution to conference › Conference article › Scientific › peer-review

Original language	English
Number of pages	10
Publication status	Published - 2004
MoE publication type	Not Eligible
Event	International Workshop on Micromechatronics and Micro and Nano Fabrication - Karlsruhe, Germany Duration: 5 Oct 2004 → 6 Oct 2004

Conference

Conference	International Workshop on Micromechatronics and Micro and Nano Fabrication
Country/Territory	Germany
City	Karlsruhe
Period	5/10/04 → 6/10/04

Cite this

@conference{733ab5ea0b72483bacea2765a870ac9f,

title = "Micro and nanotechnologies for photonic and electronic applications",

author = "Harri Kopola and Hannu Kattelus and Jorma Lammasniemi",

note = "No bibliographic info about proceedings publication found; International Workshop on Micromechatronics and Micro and Nano Fabrication ; Conference date: 05-10-2004 Through 06-10-2004",

year = "2004",

language = "English",

}

TY - CONF

T1 - Micro and nanotechnologies for photonic and electronic applications

AU - Kopola, Harri

AU - Kattelus, Hannu

AU - Lammasniemi, Jorma

N1 - No bibliographic info about proceedings publication found

PY - 2004

Y1 - 2004

M3 - Conference article

T2 - International Workshop on Micromechatronics and Micro and Nano Fabrication

Y2 - 5 October 2004 through 6 October 2004

ER -