Micro-machined Fabry-Pérot interferometer for thermal infrared

Mikko Tuohiniemi, Antti Näsilä, Martti Blomberg, Jarkko Antila, Heikki Saari

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIEEE Sensors 2013
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages179-182
ISBN (Electronic)978-1-4673-4642-9
DOIs
Publication statusPublished - 2013
MoE publication typeNot Eligible
EventIEEE SENSORS 2013 Conference - Baltimore, United States
Duration: 4 Nov 20136 Nov 2013

Conference

ConferenceIEEE SENSORS 2013 Conference
CountryUnited States
CityBaltimore
Period4/11/136/11/13

Cite this

Tuohiniemi, M., Näsilä, A., Blomberg, M., Antila, J., & Saari, H. (2013). Micro-machined Fabry-Pérot interferometer for thermal infrared. In Proceedings: IEEE Sensors 2013 (pp. 179-182). Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/ICSENS.2013.6688168
Tuohiniemi, Mikko ; Näsilä, Antti ; Blomberg, Martti ; Antila, Jarkko ; Saari, Heikki. / Micro-machined Fabry-Pérot interferometer for thermal infrared. Proceedings: IEEE Sensors 2013. Institute of Electrical and Electronic Engineers IEEE, 2013. pp. 179-182
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Tuohiniemi, M, Näsilä, A, Blomberg, M, Antila, J & Saari, H 2013, Micro-machined Fabry-Pérot interferometer for thermal infrared. in Proceedings: IEEE Sensors 2013. Institute of Electrical and Electronic Engineers IEEE, pp. 179-182, IEEE SENSORS 2013 Conference, Baltimore, United States, 4/11/13. https://doi.org/10.1109/ICSENS.2013.6688168

Micro-machined Fabry-Pérot interferometer for thermal infrared. / Tuohiniemi, Mikko; Näsilä, Antti; Blomberg, Martti; Antila, Jarkko; Saari, Heikki.

Proceedings: IEEE Sensors 2013. Institute of Electrical and Electronic Engineers IEEE, 2013. p. 179-182.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Micro-machined Fabry-Pérot interferometer for thermal infrared

AU - Tuohiniemi, Mikko

AU - Näsilä, Antti

AU - Blomberg, Martti

AU - Antila, Jarkko

AU - Saari, Heikki

PY - 2013

Y1 - 2013

U2 - 10.1109/ICSENS.2013.6688168

DO - 10.1109/ICSENS.2013.6688168

M3 - Conference article in proceedings

SP - 179

EP - 182

BT - Proceedings

PB - Institute of Electrical and Electronic Engineers IEEE

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Tuohiniemi M, Näsilä A, Blomberg M, Antila J, Saari H. Micro-machined Fabry-Pérot interferometer for thermal infrared. In Proceedings: IEEE Sensors 2013. Institute of Electrical and Electronic Engineers IEEE. 2013. p. 179-182 https://doi.org/10.1109/ICSENS.2013.6688168