Micro-machined Fabry-Pérot interferometer for thermal infrared

Mikko Tuohiniemi, Antti Näsilä, Martti Blomberg, Jarkko Antila, Heikki Saari

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    4 Citations (Scopus)
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationIEEE Sensors 2013
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages179-182
    ISBN (Electronic)978-1-4673-4642-9
    DOIs
    Publication statusPublished - 2013
    MoE publication typeNot Eligible
    EventIEEE SENSORS 2013 Conference - Baltimore, United States
    Duration: 4 Nov 20136 Nov 2013

    Conference

    ConferenceIEEE SENSORS 2013 Conference
    CountryUnited States
    CityBaltimore
    Period4/11/136/11/13

    Cite this

    Tuohiniemi, M., Näsilä, A., Blomberg, M., Antila, J., & Saari, H. (2013). Micro-machined Fabry-Pérot interferometer for thermal infrared. In Proceedings: IEEE Sensors 2013 (pp. 179-182). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/ICSENS.2013.6688168