Micro-machined Fabry-Pérot interferometer for thermal infrared

Mikko Tuohiniemi; Antti Näsilä; Martti Blomberg; Jarkko Antila; Heikki Saari

doi:10.1109/ICSENS.2013.6688168

Micro-machined Fabry-Pérot interferometer for thermal infrared

Mikko Tuohiniemi, Antti Näsilä, Martti Blomberg, Jarkko Antila, Heikki Saari

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

5 Citations (Scopus)

Original language	English
Title of host publication	IEEE Sensors 2013
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	179-182
ISBN (Electronic)	978-1-4673-4642-9
DOIs	https://doi.org/10.1109/ICSENS.2013.6688168
Publication status	Published - 2013
MoE publication type	A4 Article in a conference publication
Event	IEEE SENSORS 2013 Conference - Baltimore, United States Duration: 4 Nov 2013 → 6 Nov 2013

Publication series

Series	Proceedings of IEEE Sensors
Volume	2013
ISSN	1930-0395

Conference

Conference	IEEE SENSORS 2013 Conference
Country/Territory	United States
City	Baltimore
Period	4/11/13 → 6/11/13

Access to Document

10.1109/ICSENS.2013.6688168

Cite this

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title = "Micro-machined Fabry-P{\'e}rot interferometer for thermal infrared",

author = "Mikko Tuohiniemi and Antti N{\"a}sil{\"a} and Martti Blomberg and Jarkko Antila and Heikki Saari",

year = "2013",

doi = "10.1109/ICSENS.2013.6688168",

language = "English",

series = "Proceedings of IEEE Sensors",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

pages = "179--182",

booktitle = "IEEE Sensors 2013",

address = "United States",

note = "IEEE SENSORS 2013 Conference ; Conference date: 04-11-2013 Through 06-11-2013",

}

Tuohiniemi, M, Näsilä, A, Blomberg, M, Antila, J & Saari, H 2013, Micro-machined Fabry-Pérot interferometer for thermal infrared. in IEEE Sensors 2013. IEEE Institute of Electrical and Electronic Engineers, Proceedings of IEEE Sensors, vol. 2013, pp. 179-182, IEEE SENSORS 2013 Conference, Baltimore, Maryland, United States, 4/11/13. https://doi.org/10.1109/ICSENS.2013.6688168

Micro-machined Fabry-Pérot interferometer for thermal infrared. / Tuohiniemi, Mikko; Näsilä, Antti; Blomberg, Martti et al.

IEEE Sensors 2013. IEEE Institute of Electrical and Electronic Engineers, 2013. p. 179-182 (Proceedings of IEEE Sensors, Vol. 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Micro-machined Fabry-Pérot interferometer for thermal infrared

AU - Tuohiniemi, Mikko

AU - Näsilä, Antti

AU - Blomberg, Martti

AU - Antila, Jarkko

AU - Saari, Heikki

PY - 2013

Y1 - 2013

U2 - 10.1109/ICSENS.2013.6688168

DO - 10.1109/ICSENS.2013.6688168

M3 - Conference article in proceedings

T3 - Proceedings of IEEE Sensors

SP - 179

EP - 182

BT - IEEE Sensors 2013

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE SENSORS 2013 Conference

Y2 - 4 November 2013 through 6 November 2013

ER -