@inproceedings{651cd7d2127c40b38d00c9d9fe8e4f1f,
title = "Micro-machined Fabry-P{\'e}rot interferometer for thermal infrared",
author = "Mikko Tuohiniemi and Antti N{\"a}sil{\"a} and Martti Blomberg and Jarkko Antila and Heikki Saari",
year = "2013",
doi = "10.1109/ICSENS.2013.6688168",
language = "English",
pages = "179--182",
booktitle = "Proceedings",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
address = "United States",
note = "IEEE SENSORS 2013 Conference ; Conference date: 04-11-2013 Through 06-11-2013",
}