Micro roll-to-roll patterning process and its application on flexible display

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    14 Citations (Scopus)

    Abstract

    Novel electrode patterning techniques on thin polymer substrates were developed on a roll-to-roll (reel-to-reel, R2R) printing system. Hot embossing, laser ablation, and lift-off processes were evaluated for mass production for active-matrix display arrays with 1000 µm display pixels by using the concept of micro electro mechanical system (MEMS) Fabry–Perot etalon. Among which, the newly developed lift-off flexography process provided the best pattern integrity with 100 µm resolution. The demonstrator of display array proved R2R printing system's possibility and capability under 1 m/s speed. A complete multilayer stack demonstration with alignment process also indicated its variable application. Further actuation for the MEMS display proved the robustness of device made by printing techniques.
    Original languageEnglish
    JournalJapanese Journal of Applied Physics
    Volume48
    Issue number6 Part 2
    DOIs
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

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