Micro roll-to-roll patterning process and its application on flexible display

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Abstract

Novel electrode patterning techniques on thin polymer substrates were developed on a roll-to-roll (reel-to-reel, R2R) printing system. Hot embossing, laser ablation, and lift-off processes were evaluated for mass production for active-matrix display arrays with 1000 µm display pixels by using the concept of micro electro mechanical system (MEMS) Fabry–Perot etalon. Among which, the newly developed lift-off flexography process provided the best pattern integrity with 100 µm resolution. The demonstrator of display array proved R2R printing system's possibility and capability under 1 m/s speed. A complete multilayer stack demonstration with alignment process also indicated its variable application. Further actuation for the MEMS display proved the robustness of device made by printing techniques.
Original languageEnglish
JournalJapanese Journal of Applied Physics
Volume48
Issue number6 Part 2
DOIs
Publication statusPublished - 2009
MoE publication typeA1 Journal article-refereed

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