Micro roll-to-roll patterning process and its application on flexible display

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)

Abstract

Novel electrode patterning techniques on thin polymer substrates were developed on a roll-to-roll (reel-to-reel, R2R) printing system. Hot embossing, laser ablation, and lift-off processes were evaluated for mass production for active-matrix display arrays with 1000 µm display pixels by using the concept of micro electro mechanical system (MEMS) Fabry–Perot etalon. Among which, the newly developed lift-off flexography process provided the best pattern integrity with 100 µm resolution. The demonstrator of display array proved R2R printing system's possibility and capability under 1 m/s speed. A complete multilayer stack demonstration with alignment process also indicated its variable application. Further actuation for the MEMS display proved the robustness of device made by printing techniques.
Original languageEnglish
JournalJapanese Journal of Applied Physics
Volume48
Issue number6 Part 2
DOIs
Publication statusPublished - 2009
MoE publication typeA1 Journal article-refereed

Fingerprint

Flexible displays
printing
Display devices
Printing
embossing
display devices
actuation
integrity
laser ablation
Laser ablation
pixels
alignment
Multilayers
Demonstrations
electrodes
Pixels
polymers
matrices
Electrodes
Polymers

Cite this

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title = "Micro roll-to-roll patterning process and its application on flexible display",
abstract = "Novel electrode patterning techniques on thin polymer substrates were developed on a roll-to-roll (reel-to-reel, R2R) printing system. Hot embossing, laser ablation, and lift-off processes were evaluated for mass production for active-matrix display arrays with 1000 µm display pixels by using the concept of micro electro mechanical system (MEMS) Fabry–Perot etalon. Among which, the newly developed lift-off flexography process provided the best pattern integrity with 100 µm resolution. The demonstrator of display array proved R2R printing system's possibility and capability under 1 m/s speed. A complete multilayer stack demonstration with alignment process also indicated its variable application. Further actuation for the MEMS display proved the robustness of device made by printing techniques.",
author = "C.-Y. Lo and Johanna Hiitola-Kein{\"a}nen and Olli-Heikki Huttunen and Jarno Pet{\"a}j{\"a} and Jukka Hast and Arto Maaninen and Harri Kopola",
year = "2009",
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language = "English",
volume = "48",
journal = "Japanese Journal of Applied Physics",
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publisher = "Japan Society of Applied Physics",
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Micro roll-to-roll patterning process and its application on flexible display. / Lo, C.-Y.; Hiitola-Keinänen, Johanna; Huttunen, Olli-Heikki; Petäjä, Jarno; Hast, Jukka; Maaninen, Arto; Kopola, Harri.

In: Japanese Journal of Applied Physics, Vol. 48, No. 6 Part 2, 2009.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Micro roll-to-roll patterning process and its application on flexible display

AU - Lo, C.-Y.

AU - Hiitola-Keinänen, Johanna

AU - Huttunen, Olli-Heikki

AU - Petäjä, Jarno

AU - Hast, Jukka

AU - Maaninen, Arto

AU - Kopola, Harri

PY - 2009

Y1 - 2009

N2 - Novel electrode patterning techniques on thin polymer substrates were developed on a roll-to-roll (reel-to-reel, R2R) printing system. Hot embossing, laser ablation, and lift-off processes were evaluated for mass production for active-matrix display arrays with 1000 µm display pixels by using the concept of micro electro mechanical system (MEMS) Fabry–Perot etalon. Among which, the newly developed lift-off flexography process provided the best pattern integrity with 100 µm resolution. The demonstrator of display array proved R2R printing system's possibility and capability under 1 m/s speed. A complete multilayer stack demonstration with alignment process also indicated its variable application. Further actuation for the MEMS display proved the robustness of device made by printing techniques.

AB - Novel electrode patterning techniques on thin polymer substrates were developed on a roll-to-roll (reel-to-reel, R2R) printing system. Hot embossing, laser ablation, and lift-off processes were evaluated for mass production for active-matrix display arrays with 1000 µm display pixels by using the concept of micro electro mechanical system (MEMS) Fabry–Perot etalon. Among which, the newly developed lift-off flexography process provided the best pattern integrity with 100 µm resolution. The demonstrator of display array proved R2R printing system's possibility and capability under 1 m/s speed. A complete multilayer stack demonstration with alignment process also indicated its variable application. Further actuation for the MEMS display proved the robustness of device made by printing techniques.

U2 - 10.1143/JJAP.48.06FC04

DO - 10.1143/JJAP.48.06FC04

M3 - Article

VL - 48

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

SN - 0021-4922

IS - 6 Part 2

ER -