Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications

    Research output: Contribution to conferenceConference articleScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 2017
    EventMicroPhononics and applications Workshop - Besancon, France
    Duration: 16 Nov 201717 Nov 2017

    Workshop

    WorkshopMicroPhononics and applications Workshop
    CountryFrance
    CityBesancon
    Period16/11/1717/11/17

    Keywords

    • MEMS
    • piezo-MEMS
    • sensors
    • microacoustics
    • ultrasound

    Cite this

    Pensala, T. (2017). Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications. Paper presented at MicroPhononics and applications Workshop, Besancon, France.
    Pensala, Tuomas. / Microacoustics and Piezo-MEMS at VTT : Technology platforms and applications. Paper presented at MicroPhononics and applications Workshop, Besancon, France.
    @conference{078c88163975467f92105616e99a745f,
    title = "Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications",
    keywords = "MEMS, piezo-MEMS, sensors, microacoustics, ultrasound",
    author = "Tuomas Pensala",
    year = "2017",
    language = "English",
    note = "MicroPhononics and applications Workshop ; Conference date: 16-11-2017 Through 17-11-2017",

    }

    Pensala, T 2017, 'Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications', Paper presented at MicroPhononics and applications Workshop, Besancon, France, 16/11/17 - 17/11/17.

    Microacoustics and Piezo-MEMS at VTT : Technology platforms and applications. / Pensala, Tuomas.

    2017. Paper presented at MicroPhononics and applications Workshop, Besancon, France.

    Research output: Contribution to conferenceConference articleScientificpeer-review

    TY - CONF

    T1 - Microacoustics and Piezo-MEMS at VTT

    T2 - Technology platforms and applications

    AU - Pensala, Tuomas

    PY - 2017

    Y1 - 2017

    KW - MEMS

    KW - piezo-MEMS

    KW - sensors

    KW - microacoustics

    KW - ultrasound

    M3 - Conference article

    ER -

    Pensala T. Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications. 2017. Paper presented at MicroPhononics and applications Workshop, Besancon, France.