Microacoustics and Piezo-MEMS at VTT

Technology platforms and applications

Research output: Contribution to conferenceConference articleScientificpeer-review

Original languageEnglish
Publication statusPublished - 2017
EventMicroPhononics and applications Workshop - Besancon, France
Duration: 16 Nov 201717 Nov 2017

Workshop

WorkshopMicroPhononics and applications Workshop
CountryFrance
CityBesancon
Period16/11/1717/11/17

Keywords

  • MEMS
  • piezo-MEMS
  • sensors
  • microacoustics
  • ultrasound

Cite this

Pensala, T. (2017). Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications. Paper presented at MicroPhononics and applications Workshop, Besancon, France.
Pensala, Tuomas. / Microacoustics and Piezo-MEMS at VTT : Technology platforms and applications. Paper presented at MicroPhononics and applications Workshop, Besancon, France.
@conference{078c88163975467f92105616e99a745f,
title = "Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications",
keywords = "MEMS, piezo-MEMS, sensors, microacoustics, ultrasound",
author = "Tuomas Pensala",
year = "2017",
language = "English",
note = "MicroPhononics and applications Workshop ; Conference date: 16-11-2017 Through 17-11-2017",

}

Pensala, T 2017, 'Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications' Paper presented at MicroPhononics and applications Workshop, Besancon, France, 16/11/17 - 17/11/17, .

Microacoustics and Piezo-MEMS at VTT : Technology platforms and applications. / Pensala, Tuomas.

2017. Paper presented at MicroPhononics and applications Workshop, Besancon, France.

Research output: Contribution to conferenceConference articleScientificpeer-review

TY - CONF

T1 - Microacoustics and Piezo-MEMS at VTT

T2 - Technology platforms and applications

AU - Pensala, Tuomas

PY - 2017

Y1 - 2017

KW - MEMS

KW - piezo-MEMS

KW - sensors

KW - microacoustics

KW - ultrasound

M3 - Conference article

ER -

Pensala T. Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications. 2017. Paper presented at MicroPhononics and applications Workshop, Besancon, France.