Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications

    Research output: Contribution to conferenceConference articleScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 2017
    MoE publication typeNot Eligible
    EventMicroPhononics and applications Workshop - Besancon, France
    Duration: 16 Nov 201717 Nov 2017

    Workshop

    WorkshopMicroPhononics and applications Workshop
    CountryFrance
    CityBesancon
    Period16/11/1717/11/17

    Keywords

    • MEMS
    • piezo-MEMS
    • sensors
    • microacoustics
    • ultrasound
    • OtaNano

    Equipment

  • Cite this

    Pensala, T. (2017). Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications. Paper presented at MicroPhononics and applications Workshop, Besancon, France.