Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications

Research output: Contribution to conference › Conference article › Scientific › peer-review

Original language	English
Publication status	Published - 2017
MoE publication type	Not Eligible
Event	MicroPhononics and applications Workshop - Besancon, France Duration: 16 Nov 2017 → 17 Nov 2017

Workshop	MicroPhononics and applications Workshop
Country/Territory	France
City	Besancon
Period	16/11/17 → 17/11/17

Keywords

@conference{078c88163975467f92105616e99a745f,

title = "Microacoustics and Piezo-MEMS at VTT: Technology platforms and applications",

keywords = "MEMS, piezo-MEMS, sensors, microacoustics, ultrasound, OtaNano",

author = "Tuomas Pensala",

year = "2017",

language = "English",

note = "MicroPhononics and applications Workshop ; Conference date: 16-11-2017 Through 17-11-2017",

}