Microelectromechanical components in electrical metrology

Antti Manninen, Anu Kärkkäinen, Nadine Pesonen, Aarne Oja, Heikki Seppä

Research output: Book/ReportReport

Original languageFrench
Number of pages21
Publication statusPublished - 2007
MoE publication typeD4 Published development or research report or study

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