| Original language | French |
|---|---|
| Number of pages | 21 |
| Publication status | Published - 2007 |
| MoE publication type | D4 Published development or research report or study |
Microelectromechanical components in electrical metrology
Antti Manninen, Anu Kärkkäinen, Nadine Pesonen, Aarne Oja, Heikki Seppä
Research output: Book/Report › Report