Microelectromechanical components in electrical metrology

Antti Manninen, Anu Kärkkäinen, Nadine Pesonen, Aarne Oja, Heikki Seppä

Research output: Book/ReportReport

Original languageFrench
Number of pages21
Publication statusPublished - 2007
MoE publication typeD4 Published development or research report or study

Cite this

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title = "Microelectromechanical components in electrical metrology",
author = "Antti Manninen and Anu K{\"a}rkk{\"a}inen and Nadine Pesonen and Aarne Oja and Heikki Sepp{\"a}",
year = "2007",
language = "French",

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Microelectromechanical components in electrical metrology. / Manninen, Antti; Kärkkäinen, Anu; Pesonen, Nadine; Oja, Aarne; Seppä, Heikki.

2007. 21 p.

Research output: Book/ReportReport

TY - BOOK

T1 - Microelectromechanical components in electrical metrology

AU - Manninen, Antti

AU - Kärkkäinen, Anu

AU - Pesonen, Nadine

AU - Oja, Aarne

AU - Seppä, Heikki

PY - 2007

Y1 - 2007

M3 - Report

BT - Microelectromechanical components in electrical metrology

ER -