Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric instrumentation. In addition to their small bulk, low consumption and reduced cost in mass production, they also offer good stability and lower 1/f noise. In practice however, the stability of MEMS components is often limited by electrostatic field effects on surfaces and interfaces, as well as on dielectric layers. Ongoing research is trying to address this issue.
|Translated title of the contribution||Microelectromechanical components in electrical metrology|
|Title of host publication||Techniques de l'Ingénieur, traité Mesures et Controle|
|Number of pages||12|
|Publication status||Published - 2007|
|MoE publication type||B2 Part of a book or another research book|