Applications des MEMS à la métrologie électrique

Translated title of the contribution: Microelectromechanical components in electrical metrology

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientific

Abstract

Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric instrumentation. In addition to their small bulk, low consumption and reduced cost in mass production, they also offer good stability and lower 1/f noise. In practice however, the stability of MEMS components is often limited by electrostatic field effects on surfaces and interfaces, as well as on dielectric layers. Ongoing research is trying to address this issue.
Translated title of the contributionMicroelectromechanical components in electrical metrology
Original languageFrench
Title of host publicationTechniques de l'Ingénieur, traité Mesures et Controle
Number of pages12
VolumeRE2
Publication statusPublished - 2007
MoE publication typeB2 Part of a book or another research book

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