| Original language | French |
|---|---|
| Number of pages | 21 |
| Publication status | Published - 2007 |
| MoE publication type | D4 Published development or research report or study |
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Microelectromechanical components in electrical metrology
- Antti Manninen
- , Anu Kärkkäinen
- , Nadine Pesonen
- , Aarne Oja
- , Heikki Seppä
Research output: Book/Report › Report