Microelectromechanical components in electrical metrology

Antti Manninen, Anu Kärkkäinen, Nadine Pesonen, Aarne Oja, Heikki Seppä

    Research output: Book/ReportReport

    Fingerprint

    Dive into the research topics of 'Microelectromechanical components in electrical metrology'. Together they form a unique fingerprint.