A slow-wave microelectromechanical delay line, composed of a chain of coupled resonators, is introduced. The delay line has a bandpass response and, depending on structural details, signal group velocity can be as low as ~10 m s−1, that is over 100 times smaller than for acoustical SAW or BAW delay lines. Properties of the delay line are analyzed theoretically and the theory is verified in measurements.
|Journal||Journal of Micromechanics and Microengineering|
|Publication status||Published - 4 Aug 2006|
|MoE publication type||A1 Journal article-refereed|