Microelectromechanical delay lines with slow signal propagation

Ari T. Alastalo; Jyrki Kiihamäki; Heikki Seppä

doi:10.1088/0960-1317/16/9/014

Microelectromechanical delay lines with slow signal propagation

Ari T. Alastalo, Jyrki Kiihamäki, Heikki Seppä

VTT Technical Research Centre of Finland

Research output: Contribution to journal › Article › Scientific › peer-review

6 Citations (Scopus)

Abstract

A slow-wave microelectromechanical delay line, composed of a chain of coupled resonators, is introduced. The delay line has a bandpass response and, depending on structural details, signal group velocity can be as low as ~10 m s⁻¹, that is over 100 times smaller than for acoustical SAW or BAW delay lines. Properties of the delay line are analyzed theoretically and the theory is verified in measurements.

Original language	English
Pages (from-to)	1854-1860
Journal	Journal of Micromechanics and Microengineering
Volume	16
Issue number	9
DOIs	https://doi.org/10.1088/0960-1317/16/9/014
Publication status	Published - 4 Aug 2006
MoE publication type	A1 Journal article-refereed

Keywords

microelectromechanical
measurement

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10.1088/0960-1317/16/9/014

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Cite this

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title = "Microelectromechanical delay lines with slow signal propagation",

abstract = "A slow-wave microelectromechanical delay line, composed of a chain of coupled resonators, is introduced. The delay line has a bandpass response and, depending on structural details, signal group velocity can be as low as ~10 m s−1, that is over 100 times smaller than for acoustical SAW or BAW delay lines. Properties of the delay line are analyzed theoretically and the theory is verified in measurements.",

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AU - Alastalo, Ari T.

AU - Kiihamäki, Jyrki

AU - Seppä, Heikki

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N2 - A slow-wave microelectromechanical delay line, composed of a chain of coupled resonators, is introduced. The delay line has a bandpass response and, depending on structural details, signal group velocity can be as low as ~10 m s−1, that is over 100 times smaller than for acoustical SAW or BAW delay lines. Properties of the delay line are analyzed theoretically and the theory is verified in measurements.

AB - A slow-wave microelectromechanical delay line, composed of a chain of coupled resonators, is introduced. The delay line has a bandpass response and, depending on structural details, signal group velocity can be as low as ~10 m s−1, that is over 100 times smaller than for acoustical SAW or BAW delay lines. Properties of the delay line are analyzed theoretically and the theory is verified in measurements.

KW - microelectromechanical

KW - measurement

U2 - 10.1088/0960-1317/16/9/014

DO - 10.1088/0960-1317/16/9/014

M3 - Article

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EP - 1860

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 9

ER -

Microelectromechanical delay lines with slow signal propagation

Abstract

Keywords

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