Microelectromechanical delay lines with slow signal propagation

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

Abstract

A slow-wave microelectromechanical delay line, composed of a chain of coupled resonators, is introduced. The delay line has a bandpass response and, depending on structural details, signal group velocity can be as low as ~10 m s−1, that is over 100 times smaller than for acoustical SAW or BAW delay lines. Properties of the delay line are analyzed theoretically and the theory is verified in measurements.
Original languageEnglish
Pages (from-to)1854-1860
JournalJournal of Micromechanics and Microengineering
Volume16
Issue number9
DOIs
Publication statusPublished - 4 Aug 2006
MoE publication typeA1 Journal article-refereed

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Electric delay lines
Resonators

Keywords

  • microelectromechanical
  • measurement

Cite this

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title = "Microelectromechanical delay lines with slow signal propagation",
abstract = "A slow-wave microelectromechanical delay line, composed of a chain of coupled resonators, is introduced. The delay line has a bandpass response and, depending on structural details, signal group velocity can be as low as ~10 m s−1, that is over 100 times smaller than for acoustical SAW or BAW delay lines. Properties of the delay line are analyzed theoretically and the theory is verified in measurements.",
keywords = "microelectromechanical, measurement",
author = "Alastalo, {Ari T.} and Jyrki Kiiham{\"a}ki and Heikki Sepp{\"a}",
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language = "English",
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}

Microelectromechanical delay lines with slow signal propagation. / Alastalo, Ari T.; Kiihamäki, Jyrki; Seppä, Heikki.

In: Journal of Micromechanics and Microengineering, Vol. 16, No. 9, 04.08.2006, p. 1854-1860.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Microelectromechanical delay lines with slow signal propagation

AU - Alastalo, Ari T.

AU - Kiihamäki, Jyrki

AU - Seppä, Heikki

PY - 2006/8/4

Y1 - 2006/8/4

N2 - A slow-wave microelectromechanical delay line, composed of a chain of coupled resonators, is introduced. The delay line has a bandpass response and, depending on structural details, signal group velocity can be as low as ~10 m s−1, that is over 100 times smaller than for acoustical SAW or BAW delay lines. Properties of the delay line are analyzed theoretically and the theory is verified in measurements.

AB - A slow-wave microelectromechanical delay line, composed of a chain of coupled resonators, is introduced. The delay line has a bandpass response and, depending on structural details, signal group velocity can be as low as ~10 m s−1, that is over 100 times smaller than for acoustical SAW or BAW delay lines. Properties of the delay line are analyzed theoretically and the theory is verified in measurements.

KW - microelectromechanical

KW - measurement

U2 - 10.1088/0960-1317/16/9/014

DO - 10.1088/0960-1317/16/9/014

M3 - Article

VL - 16

SP - 1854

EP - 1860

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 9

ER -