Microelectromechanical delay lines with slow signal propagation

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6 Citations (Scopus)

Abstract

A slow-wave microelectromechanical delay line, composed of a chain of coupled resonators, is introduced. The delay line has a bandpass response and, depending on structural details, signal group velocity can be as low as ~10 m s−1, that is over 100 times smaller than for acoustical SAW or BAW delay lines. Properties of the delay line are analyzed theoretically and the theory is verified in measurements.
Original languageEnglish
Pages (from-to)1854-1860
JournalJournal of Micromechanics and Microengineering
Volume16
Issue number9
DOIs
Publication statusPublished - 4 Aug 2006
MoE publication typeA1 Journal article-refereed

Keywords

  • microelectromechanical
  • measurement

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