Microelectromechanical gyroscope

Sergey Gorelick (Inventor), Antti Jaakkola (Inventor)

Research output: PatentPatent

Abstract

The invention relates to a micromechanical gyroscope comprising a substrate, at least one gyroscopic element comprising a mass element, suspension means for flexibly connecting the mass element with respect to the substrate, means for exciting the mass element into a vibrational mode and sensing means for detecting vibrational characteristics of the mass element. According to the invention, the vibrational mode is a bi-directional orbiting mode and the sensing means are adapted to detect changes in vibrational characteristics of the orbiting mode, such as a phase shift or change in resonance frequency or orbiting radius of the orbiting mode caused by external rotational motion. The invention helps to improve the signal-to-noise ratio of micromechanical gyroscopes.

Patent family as of 6.10.2021
EP2775258A1 20140910 EP20130157878 20130305      
EP2775258B1 20160203 EP20130157878 20130305

Link to current patent family on right 

Original languageEnglish
Patent numberEP2775258
IPCG01C 19/ 5684 A I
Priority date5/03/13
Publication statusPublished - 10 Sep 2014
MoE publication typeH1 Granted patent

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