Abstract
The invention relates to a micromechanical gyroscope comprising a substrate, at least one gyroscopic element comprising a mass element, suspension means for flexibly connecting the mass element with respect to the substrate, means for exciting the mass element into a vibrational mode and sensing means for detecting vibrational characteristics of the mass element. According to the invention, the vibrational mode is a bi-directional orbiting mode and the sensing means are adapted to detect changes in vibrational characteristics of the orbiting mode, such as a phase shift or change in resonance frequency or orbiting radius of the orbiting mode caused by external rotational motion. The invention helps to improve the signal-to-noise ratio of micromechanical gyroscopes.
Patent family as of 6.10.2021
EP2775258A1 20140910 EP20130157878 20130305
EP2775258B1 20160203 EP20130157878 20130305
Link to current patent family on right
| Original language | English |
|---|---|
| Patent number | EP2775258 |
| IPC | G01C 19/ 5684 A I |
| Priority date | 5/03/13 |
| Publication status | Published - 10 Sept 2014 |
| MoE publication type | H1 Granted patent |