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Microelectromechanical infrared spectrometer: Master's thesis
Akseli Miranto
VTT Technical Research Centre of Finland
Research output
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Thesis
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Master's thesis
Overview
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INIS
performance
100%
spectrometers
100%
infrared spectrometers
100%
thermopiles
100%
simulation
75%
fabry-perot interferometer
75%
cost
50%
liquids
50%
spectra
50%
laboratories
50%
solutions
25%
comparative evaluations
25%
control
25%
processing
25%
operation
25%
transmission
25%
resolution
25%
interferometers
25%
Keyphrases
Spectrometer
100%
Infrared Spectrometer
100%
Micromechanics
100%
Master's Thesis
100%
Thermopile Sensor
100%
MEMS Fabry-Perot Interferometer
66%
Commercially Available
33%
Transmission Spectrum
33%
Optical Performance
33%
Fabry-Perot Interferometer
33%
Spectral Resolution
33%
Interferometer
33%
MEMS Components
33%
Thermopile
33%
Electrical Control
33%
Laboratory Spectrometer
33%
Engineering
Thermopile
100%
Microelectromechanical System
75%
Fabry Perot
75%
Perot Interferometer
75%
Optical Performance
25%
Spectral Resolution
25%
Physics
Spectrometer
100%
Fabry-Perot Interferometer
42%
Microelectromechanical System
42%
Transmission Spectrum
14%