Microelectromechanical resonator-based components for wireless communications: Filters and transmission lines: Dissertation

Research output: ThesisDissertationCollection of Articles

Abstract

Starting in the early 1960's, when the integrated-circuit (IC) technology was developed, micromachining and microelectromechanical systems (MEMS) have grown into a broad research field with several commercial successes. Typical applications of MEMS are in physical, chemical and biochemical sensors, as well as in optical systems such as the digital micromirror device of Texas Instruments. From the 1990's, the advances in the processing technologies and the tremendous growth of the wireless-communication market have drawn much interest into radio-frequency MEMS devices (RF MEMS) such as filters, oscillators, switches and tunable capacitors. These are now beginning to penetrate the market.
This thesis considers electrostatically-actuated RF-MEMS filters and delay lines. For filters, the work concentrates on nonlinear distortion and filter design. The intermodulation properties of capacitively-coupled MEMS filters are analytically solved in closed form and the theory is verified in numerical simulations as well as in measurements with MEMS resonators. The analysis is more generally valid than the previously published results. The theory is utilized to formulate a design procedure for MEMS filters that, for the first time, takes systems speci-fications for tolerable intermodulation distortion and insertion-loss into account. For delay lines, capacitive actuation of bulk-acoustic waves in a solid rod is analyzed. In particular, challenges in impedance matching due to the weakness of the electrostatic coupling are quantified. Finally, a new kind of resonator-chain delay line for high-frequency (HF) signals is introduced. This delay line is characterized by extremely slow signal group velocity (? 10-100 m/s), narrow-band response, and much lower characteristic impedance than found for the solid-rod waveguide enabling efficient signal coupling. Properties of the resonator-chain waveguide are theoretically analyzed and the results are verified in measurements of fabricated devices.
Original languageEnglish
QualificationDoctor Degree
Awarding Institution
  • Helsinki University of Technology
Award date1 Nov 2006
Publisher
Print ISBNs951-38-6865-6
Electronic ISBNs951-38-6866-4
Publication statusPublished - 2006
MoE publication typeG5 Doctoral dissertation (article)

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MEMS
Resonators
Electric lines
Communication
Electric delay lines
Waveguides
Intermodulation distortion
Digital devices
Intermodulation
Nonlinear distortion
Micromachining
Insertion losses
Optical systems
Integrated circuits
Electrostatics
Capacitors
Switches
Acoustic waves
Sensors
Computer simulation

Cite this

@phdthesis{81203ad9172f4c62a2eae76fbea1c97e,
title = "Microelectromechanical resonator-based components for wireless communications: Filters and transmission lines: Dissertation",
abstract = "Starting in the early 1960's, when the integrated-circuit (IC) technology was developed, micromachining and microelectromechanical systems (MEMS) have grown into a broad research field with several commercial successes. Typical applications of MEMS are in physical, chemical and biochemical sensors, as well as in optical systems such as the digital micromirror device of Texas Instruments. From the 1990's, the advances in the processing technologies and the tremendous growth of the wireless-communication market have drawn much interest into radio-frequency MEMS devices (RF MEMS) such as filters, oscillators, switches and tunable capacitors. These are now beginning to penetrate the market.This thesis considers electrostatically-actuated RF-MEMS filters and delay lines. For filters, the work concentrates on nonlinear distortion and filter design. The intermodulation properties of capacitively-coupled MEMS filters are analytically solved in closed form and the theory is verified in numerical simulations as well as in measurements with MEMS resonators. The analysis is more generally valid than the previously published results. The theory is utilized to formulate a design procedure for MEMS filters that, for the first time, takes systems speci-fications for tolerable intermodulation distortion and insertion-loss into account. For delay lines, capacitive actuation of bulk-acoustic waves in a solid rod is analyzed. In particular, challenges in impedance matching due to the weakness of the electrostatic coupling are quantified. Finally, a new kind of resonator-chain delay line for high-frequency (HF) signals is introduced. This delay line is characterized by extremely slow signal group velocity (? 10-100 m/s), narrow-band response, and much lower characteristic impedance than found for the solid-rod waveguide enabling efficient signal coupling. Properties of the resonator-chain waveguide are theoretically analyzed and the results are verified in measurements of fabricated devices.",
author = "Ari Alastalo",
year = "2006",
language = "English",
isbn = "951-38-6865-6",
series = "VTT Publications",
publisher = "VTT Technical Research Centre of Finland",
number = "616",
address = "Finland",
school = "Helsinki University of Technology",

}

Microelectromechanical resonator-based components for wireless communications : Filters and transmission lines: Dissertation. / Alastalo, Ari.

VTT Technical Research Centre of Finland, 2006. 57 p.

Research output: ThesisDissertationCollection of Articles

TY - THES

T1 - Microelectromechanical resonator-based components for wireless communications

T2 - Filters and transmission lines: Dissertation

AU - Alastalo, Ari

PY - 2006

Y1 - 2006

N2 - Starting in the early 1960's, when the integrated-circuit (IC) technology was developed, micromachining and microelectromechanical systems (MEMS) have grown into a broad research field with several commercial successes. Typical applications of MEMS are in physical, chemical and biochemical sensors, as well as in optical systems such as the digital micromirror device of Texas Instruments. From the 1990's, the advances in the processing technologies and the tremendous growth of the wireless-communication market have drawn much interest into radio-frequency MEMS devices (RF MEMS) such as filters, oscillators, switches and tunable capacitors. These are now beginning to penetrate the market.This thesis considers electrostatically-actuated RF-MEMS filters and delay lines. For filters, the work concentrates on nonlinear distortion and filter design. The intermodulation properties of capacitively-coupled MEMS filters are analytically solved in closed form and the theory is verified in numerical simulations as well as in measurements with MEMS resonators. The analysis is more generally valid than the previously published results. The theory is utilized to formulate a design procedure for MEMS filters that, for the first time, takes systems speci-fications for tolerable intermodulation distortion and insertion-loss into account. For delay lines, capacitive actuation of bulk-acoustic waves in a solid rod is analyzed. In particular, challenges in impedance matching due to the weakness of the electrostatic coupling are quantified. Finally, a new kind of resonator-chain delay line for high-frequency (HF) signals is introduced. This delay line is characterized by extremely slow signal group velocity (? 10-100 m/s), narrow-band response, and much lower characteristic impedance than found for the solid-rod waveguide enabling efficient signal coupling. Properties of the resonator-chain waveguide are theoretically analyzed and the results are verified in measurements of fabricated devices.

AB - Starting in the early 1960's, when the integrated-circuit (IC) technology was developed, micromachining and microelectromechanical systems (MEMS) have grown into a broad research field with several commercial successes. Typical applications of MEMS are in physical, chemical and biochemical sensors, as well as in optical systems such as the digital micromirror device of Texas Instruments. From the 1990's, the advances in the processing technologies and the tremendous growth of the wireless-communication market have drawn much interest into radio-frequency MEMS devices (RF MEMS) such as filters, oscillators, switches and tunable capacitors. These are now beginning to penetrate the market.This thesis considers electrostatically-actuated RF-MEMS filters and delay lines. For filters, the work concentrates on nonlinear distortion and filter design. The intermodulation properties of capacitively-coupled MEMS filters are analytically solved in closed form and the theory is verified in numerical simulations as well as in measurements with MEMS resonators. The analysis is more generally valid than the previously published results. The theory is utilized to formulate a design procedure for MEMS filters that, for the first time, takes systems speci-fications for tolerable intermodulation distortion and insertion-loss into account. For delay lines, capacitive actuation of bulk-acoustic waves in a solid rod is analyzed. In particular, challenges in impedance matching due to the weakness of the electrostatic coupling are quantified. Finally, a new kind of resonator-chain delay line for high-frequency (HF) signals is introduced. This delay line is characterized by extremely slow signal group velocity (? 10-100 m/s), narrow-band response, and much lower characteristic impedance than found for the solid-rod waveguide enabling efficient signal coupling. Properties of the resonator-chain waveguide are theoretically analyzed and the results are verified in measurements of fabricated devices.

M3 - Dissertation

SN - 951-38-6865-6

T3 - VTT Publications

PB - VTT Technical Research Centre of Finland

ER -