Microelectromechanical systems in electrical metrology

Research output: Contribution to journalArticleScientificpeer-review

32 Citations (Scopus)

Abstract

Microelectromechanical systems (MEMS) will have an important role in metrology. The essential features of a MEMS are (1) a piece of single crystal silicon forming a spring; (2) metallized surfaces of silicon structures that define an electrode geometry; (3) electrostatic forces between surfaces in a vacuum. With an electrostatic drive and readout such a system will dissipate very little power. In addition, compared to semiconducting devices, microelectromechanical components are large in size, and hence a low 1/f noise level is expected. We show that a MEMS can be used, in principle, to realize both a DC and an AC voltage reference, an AC/DC converter, a DC current reference, a low frequency voltage divider, a microwave and millimeter wave detector, etc. Unfortunately, existing MEMS technologies, where uncoated silicon structures form the electrodes, cannot be used due to trapped charges in silicon dioxide or on its surface. Thus, metallization of the surface is needed. We report preliminary results of our DC voltage reference showing a relative fluctuation level below 1 /spl mu/V/V.
Original languageEnglish
Pages (from-to)440-444
Number of pages5
JournalIEEE Transactions on Instrumentation and Measurement
Volume50
Issue number2
DOIs
Publication statusPublished - 2001
MoE publication typeA1 Journal article-refereed

Fingerprint

metrology
microelectromechanical systems
MEMS
direct current
Silicon
alternating current
electric potential
silicon
Microelectromechanical devices
electrostatics
Voltage dividers
Electrodes
electrodes
Electrostatic force
dividers
Electric potential
Metallizing
Millimeter waves
millimeter waves
converters

Cite this

@article{0c149536f2774ed6a6fe9c520a2f267b,
title = "Microelectromechanical systems in electrical metrology",
abstract = "Microelectromechanical systems (MEMS) will have an important role in metrology. The essential features of a MEMS are (1) a piece of single crystal silicon forming a spring; (2) metallized surfaces of silicon structures that define an electrode geometry; (3) electrostatic forces between surfaces in a vacuum. With an electrostatic drive and readout such a system will dissipate very little power. In addition, compared to semiconducting devices, microelectromechanical components are large in size, and hence a low 1/f noise level is expected. We show that a MEMS can be used, in principle, to realize both a DC and an AC voltage reference, an AC/DC converter, a DC current reference, a low frequency voltage divider, a microwave and millimeter wave detector, etc. Unfortunately, existing MEMS technologies, where uncoated silicon structures form the electrodes, cannot be used due to trapped charges in silicon dioxide or on its surface. Thus, metallization of the surface is needed. We report preliminary results of our DC voltage reference showing a relative fluctuation level below 1 /spl mu/V/V.",
author = "Heikki Sepp{\"a} and Jukka Kyyn{\"a}r{\"a}inen and Aarne Oja",
year = "2001",
doi = "10.1109/19.918161",
language = "English",
volume = "50",
pages = "440--444",
journal = "IEEE Transactions on Instrumentation and Measurement",
issn = "0018-9456",
publisher = "Institute of Electrical and Electronic Engineers IEEE",
number = "2",

}

Microelectromechanical systems in electrical metrology. / Seppä, Heikki; Kyynäräinen, Jukka; Oja, Aarne.

In: IEEE Transactions on Instrumentation and Measurement, Vol. 50, No. 2, 2001, p. 440-444.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Microelectromechanical systems in electrical metrology

AU - Seppä, Heikki

AU - Kyynäräinen, Jukka

AU - Oja, Aarne

PY - 2001

Y1 - 2001

N2 - Microelectromechanical systems (MEMS) will have an important role in metrology. The essential features of a MEMS are (1) a piece of single crystal silicon forming a spring; (2) metallized surfaces of silicon structures that define an electrode geometry; (3) electrostatic forces between surfaces in a vacuum. With an electrostatic drive and readout such a system will dissipate very little power. In addition, compared to semiconducting devices, microelectromechanical components are large in size, and hence a low 1/f noise level is expected. We show that a MEMS can be used, in principle, to realize both a DC and an AC voltage reference, an AC/DC converter, a DC current reference, a low frequency voltage divider, a microwave and millimeter wave detector, etc. Unfortunately, existing MEMS technologies, where uncoated silicon structures form the electrodes, cannot be used due to trapped charges in silicon dioxide or on its surface. Thus, metallization of the surface is needed. We report preliminary results of our DC voltage reference showing a relative fluctuation level below 1 /spl mu/V/V.

AB - Microelectromechanical systems (MEMS) will have an important role in metrology. The essential features of a MEMS are (1) a piece of single crystal silicon forming a spring; (2) metallized surfaces of silicon structures that define an electrode geometry; (3) electrostatic forces between surfaces in a vacuum. With an electrostatic drive and readout such a system will dissipate very little power. In addition, compared to semiconducting devices, microelectromechanical components are large in size, and hence a low 1/f noise level is expected. We show that a MEMS can be used, in principle, to realize both a DC and an AC voltage reference, an AC/DC converter, a DC current reference, a low frequency voltage divider, a microwave and millimeter wave detector, etc. Unfortunately, existing MEMS technologies, where uncoated silicon structures form the electrodes, cannot be used due to trapped charges in silicon dioxide or on its surface. Thus, metallization of the surface is needed. We report preliminary results of our DC voltage reference showing a relative fluctuation level below 1 /spl mu/V/V.

U2 - 10.1109/19.918161

DO - 10.1109/19.918161

M3 - Article

VL - 50

SP - 440

EP - 444

JO - IEEE Transactions on Instrumentation and Measurement

JF - IEEE Transactions on Instrumentation and Measurement

SN - 0018-9456

IS - 2

ER -