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Microelectromechanical systems in electrical metrology
Heikki Seppä
, Jukka Kyynäräinen
, Aarne Oja
Research output
:
Contribution to journal
›
Article
›
Scientific
›
peer-review
35
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Citations (Scopus)
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Keyphrases
Micro-electro-mechanical Systems
100%
Electrical Metrology
100%
Silicon Structure
50%
Metrology
25%
Multicrystalline Silicon
25%
DC Voltage
25%
Voltage Reference
25%
Noise Level
25%
Voltage Divider
25%
Electrostatic Force
25%
Silicon Dioxide
25%
Micromechanics
25%
Current Reference
25%
V(V)
25%
Metallization
25%
Metallized
25%
Structure Form
25%
Millimeter Wave Detectors
25%
DC Current
25%
Electrode Geometry
25%
Electrostatic Drive
25%
Micro-electro-mechanical Systems Technology
25%
AC Voltage Reference
25%
AC-DC Converter
25%
Trapped Charge
25%
Relative Fluctuation
25%
Semiconducting Device
25%
Fluctuation Frequency
25%
INIS
microelectromechanical systems
100%
metrology
100%
surfaces
80%
silicon
60%
voltage
60%
levels
40%
electrodes
40%
electrostatics
40%
comparative evaluations
20%
single crystals
20%
geometry
20%
devices
20%
power
20%
size
20%
charges
20%
noise
20%
microwave radiation
20%
trapping
20%
readout systems
20%
fluctuations
20%
silicon oxides
20%
springs
20%
Engineering
Microelectromechanical System
100%
System Technology
20%
Metallizations
20%
Essential Feature
20%
Silicon Single Crystal
20%
Electrode Geometry
20%
Millimeter Wave
20%
Noise Level
20%
Current Reference
20%
Direct Current
20%
Silicon Dioxide
20%