Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Corinna Grosse^* (Corresponding Author), Mohamad Abo Ras, Aapo Varpula, Kestutis Grigoras, Daniel May, Bernhard Wunderle, Pierre-Olivier Chapuis, Séverine Gomès, Mika Prunnila

^*Corresponding author for this work