Microfabrication of Transfer Standards for Calibration of Optical Quality Assurance System

Aneliya Karadzhinova-Ferrer; Maria Berdova; Timo Hilden; Jouni Kalevi Heino; Rauno Lauhakangas; Eija Maarit Tuominen; Sami Franssila; Edward Haeggström; Ivan Vladislavov Kassamakov

Microfabrication of Transfer Standards for Calibration of Optical Quality Assurance System

Aneliya Karadzhinova-Ferrer, Maria Berdova, Timo Hilden, Jouni Kalevi Heino, Rauno Lauhakangas, Eija Maarit Tuominen, Sami Franssila, Edward Haeggström, Ivan Vladislavov Kassamakov

Not published at VTT

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

Instrumentation of particle physics requires precisely engineered structures. Reliable quality assurance of detectors by calibrated tools is crucial. We developed and microfabricated transfer standards for lateral calibration of an optical scanning system employed for quality assurance of particle detectors. The standard was embodied as an array of cavities of specified depths and shapes. The fabrication involved common wet and dry silicon etching methods. The fabricated standards brought better than 2 µm lateral precision to rapid nondestructive QA work.

Original language	English
Title of host publication	24th Micromechanics and Microsystems Europe Conference (MME 2013)
Place of Publication	Espoo
Publication status	Published - 2013
MoE publication type	A4 Article in a conference publication
Event	24th Micromechanics and Microsystems Europe Conference - Espoo, Finland Duration: 1 Sept 2013 → 4 Sept 2013

Conference

Conference	24th Micromechanics and Microsystems Europe Conference
Country/Territory	Finland
City	Espoo
Period	1/09/13 → 4/09/13

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This output contributes to the following UN Sustainable Development Goals (SDGs)

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@inproceedings{77d507b90ca546139f1987798dfb19df,

title = "Microfabrication of Transfer Standards for Calibration of Optical Quality Assurance System",

abstract = "Instrumentation of particle physics requires precisely engineered structures. Reliable quality assurance of detectors by calibrated tools is crucial. We developed and microfabricated transfer standards for lateral calibration of an optical scanning system employed for quality assurance of particle detectors. The standard was embodied as an array of cavities of specified depths and shapes. The fabrication involved common wet and dry silicon etching methods. The fabricated standards brought better than 2 µm lateral precision to rapid nondestructive QA work.",

author = "Aneliya Karadzhinova-Ferrer and Maria Berdova and Timo Hilden and Heino, {Jouni Kalevi} and Rauno Lauhakangas and Tuominen, {Eija Maarit} and Sami Franssila and Edward Haeggstr{\"o}m and Kassamakov, {Ivan Vladislavov}",

year = "2013",

language = "English",

booktitle = "24th Micromechanics and Microsystems Europe Conference (MME 2013)",

note = "24th Micromechanics and Microsystems Europe Conference ; Conference date: 01-09-2013 Through 04-09-2013",

}

Karadzhinova-Ferrer, A, Berdova, M, Hilden, T, Heino, JK, Lauhakangas, R, Tuominen, EM, Franssila, S, Haeggström, E & Kassamakov, IV 2013, Microfabrication of Transfer Standards for Calibration of Optical Quality Assurance System. in 24th Micromechanics and Microsystems Europe Conference (MME 2013). Espoo, 24th Micromechanics and Microsystems Europe Conference, Espoo, Finland, 1/09/13.

TY - GEN

T1 - Microfabrication of Transfer Standards for Calibration of Optical Quality Assurance System

AU - Karadzhinova-Ferrer, Aneliya

AU - Berdova, Maria

AU - Hilden, Timo

AU - Heino, Jouni Kalevi

AU - Lauhakangas, Rauno

AU - Tuominen, Eija Maarit

AU - Franssila, Sami

AU - Haeggström, Edward

AU - Kassamakov, Ivan Vladislavov

PY - 2013

Y1 - 2013

N2 - Instrumentation of particle physics requires precisely engineered structures. Reliable quality assurance of detectors by calibrated tools is crucial. We developed and microfabricated transfer standards for lateral calibration of an optical scanning system employed for quality assurance of particle detectors. The standard was embodied as an array of cavities of specified depths and shapes. The fabrication involved common wet and dry silicon etching methods. The fabricated standards brought better than 2 µm lateral precision to rapid nondestructive QA work.

AB - Instrumentation of particle physics requires precisely engineered structures. Reliable quality assurance of detectors by calibrated tools is crucial. We developed and microfabricated transfer standards for lateral calibration of an optical scanning system employed for quality assurance of particle detectors. The standard was embodied as an array of cavities of specified depths and shapes. The fabrication involved common wet and dry silicon etching methods. The fabricated standards brought better than 2 µm lateral precision to rapid nondestructive QA work.

UR - https://researchportal.helsinki.fi/en/publications/12094dc8-1998-445d-8634-dcc1cf16072b

M3 - Conference article in proceedings

BT - 24th Micromechanics and Microsystems Europe Conference (MME 2013)

CY - Espoo

T2 - 24th Micromechanics and Microsystems Europe Conference

Y2 - 1 September 2013 through 4 September 2013

ER -

Microfabrication of Transfer Standards for Calibration of Optical Quality Assurance System

Abstract

Conference

UN SDGs

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