Microfabrication of Transfer Standards for Calibration of Optical Quality Assurance System
- Aneliya Karadzhinova-Ferrer
- , Maria Berdova
- , Timo Hilden
- , Jouni Kalevi Heino
- , Rauno Lauhakangas
- , Eija Maarit Tuominen
- , Sami Franssila
- , Edward Haeggström
- , Ivan Vladislavov Kassamakov
- Helsinki Institute of Physics (HIP)
- University of Helsinki
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review