Microlithography using conducting polymers

Tapio Mäkelä, Salme Jussila, Heikki Isotalo

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 1998
MoE publication typeNot Eligible
EventInternational Conference on Science and Technology of Synthetic Metals, ICSM '98 - Montpellier, France
Duration: 12 Jul 199818 Jul 1998

Conference

ConferenceInternational Conference on Science and Technology of Synthetic Metals, ICSM '98
CountryFrance
CityMontpellier
Period12/07/9818/07/98

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