Microlithography using conducting polymers

Tapio Mäkelä; Salme Jussila; Heikki Isotalo

Microlithography using conducting polymers

Tapio Mäkelä, Salme Jussila, Heikki Isotalo

Research output: Contribution to conference › Conference article › Scientific

Original language	English
Publication status	Published - 1998
MoE publication type	Not Eligible
Event	International Conference on Science and Technology of Synthetic Metals, ICSM '98 - Montpellier, France Duration: 12 Jul 1998 → 18 Jul 1998

Conference

Conference	International Conference on Science and Technology of Synthetic Metals, ICSM '98
Country/Territory	France
City	Montpellier
Period	12/07/98 → 18/07/98

Cite this

@conference{0c4f61bed891498fbb6adb4a896efc7e,

title = "Microlithography using conducting polymers",

author = "Tapio M{\"a}kel{\"a} and Salme Jussila and Heikki Isotalo",

note = "Not found under this title in the journal proceedings (Synthetic Metals vol. 101-103); International Conference on Science and Technology of Synthetic Metals, ICSM '98 ; Conference date: 12-07-1998 Through 18-07-1998",

year = "1998",

language = "English",

}

TY - CONF

T1 - Microlithography using conducting polymers

AU - Mäkelä, Tapio

AU - Jussila, Salme

AU - Isotalo, Heikki

N1 - Not found under this title in the journal proceedings (Synthetic Metals vol. 101-103)

PY - 1998

Y1 - 1998

M3 - Conference article

T2 - International Conference on Science and Technology of Synthetic Metals, ICSM '98

Y2 - 12 July 1998 through 18 July 1998

ER -