Micromachined electrically tunable Fabry-Perot Interferometer

Heikki Saari, Ari Lehto

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publication2nd Round Table on Micro/Nano Technologies for Space
Subtitle of host publicationProceedings
Place of PublicationNoordwijk
PublisherEuropean Space Agency ESA
Pages147-150
Publication statusPublished - 1997
MoE publication typeB3 Non-refereed article in conference proceedings
Event2nd Round Table on Micro/Nano Technologies for Space - , Netherlands
Duration: 15 Oct 199717 Oct 1997

Publication series

SeriesESA Workshop Preliminary Proceedings
Volume132

Conference

Conference2nd Round Table on Micro/Nano Technologies for Space
CountryNetherlands
Period15/10/9717/10/97

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