Micromachined electrically tunable Fabry-Perot Interferometer

Heikki Saari, Ari Lehto

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publication2nd Round Table on Micro/Nano Technologies for Space
    Subtitle of host publicationProceedings
    Place of PublicationNoordwijk
    PublisherEuropean Space Agency (ESA)
    Pages147-150
    Publication statusPublished - 1997
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event2nd Round Table on Micro/Nano Technologies for Space - , Netherlands
    Duration: 15 Oct 199717 Oct 1997

    Publication series

    SeriesESA Workshop Preliminary Proceedings
    Volume132

    Conference

    Conference2nd Round Table on Micro/Nano Technologies for Space
    Country/TerritoryNetherlands
    Period15/10/9717/10/97

    Cite this