@inproceedings{cf7fdafc20df43b6b45f53cc7cadde01,
title = "Micromachined electrically tunable Fabry-Perot Interferometer",
author = "Heikki Saari and Ari Lehto",
year = "1997",
language = "English",
series = "ESA Workshop Preliminary Proceedings",
publisher = "European Space Agency (ESA)",
pages = "147--150",
booktitle = "2nd Round Table on Micro/Nano Technologies for Space",
address = "France",
note = "2nd Round Table on Micro/Nano Technologies for Space ; Conference date: 15-10-1997 Through 17-10-1997",
}