Keyphrases
Sub-terahertz (sub-THz)
100%
Terahertz Systems
100%
Micromachining
100%
Integration Platform
100%
Waveguide
66%
Low Temperature
33%
Micro-electro-mechanical Systems
33%
Low Loss
33%
Manufacturing Methods
33%
Sensing Applications
33%
Silicon Wafer
33%
Communications Applications
33%
Millimeter-wave Monolithic Integrated Circuits
33%
Terahertz
33%
Efficient System
33%
Monolithic Integrated Circuits
33%
Thermocompression
33%
Laser Bonding
33%
Bonding Process
33%
Micromachined Waveguide
33%
System Integration Method
33%
Terahertz Sensing
33%
Terahertz Communications
33%
Platform-Based
33%
Waveguide Filter
33%
INIS
machining
100%
waveguides
100%
silicon
50%
integrated circuits
50%
applications
25%
bonding
25%
cost
25%
substrates
25%
low temperature
25%
losses
25%
microelectromechanical systems
25%
manufacturing
25%
lasers
25%
compression
25%
ghz range
25%
frequency range
25%
filters
25%
Engineering
Micro Machining
100%
Integration Platform
100%
Terahertz
100%
Waveguide
66%
Monolithic Integrated Circuits
33%
Integrated System
16%
Low-Temperature
16%
Integration Method
16%
Bonding Process
16%
Microelectromechanical System
16%
Sensing Application
16%
Millimeter Wave
16%
Silicon Wafer
16%
Material Science
Waveguide
100%
Micromachining
100%
Electronic Circuit
50%
Silicon Wafer
25%
Microelectromechanical System
25%
Silicon
25%