Micromachining integration platform for sub-terahertz and terahertz systems

Vladimir Ermolov*, Antti Lamminen, Jaakko Saarilahti, Ben Wälchli, Mikko Kantanen, Pekka Pursula

*Corresponding author for this work

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)

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    Engineering

    Material Science