Micromachining with tailored nanosecond pulses

Hans Herfurth, Rahul Patwa, Tim Lauterborn, Stefan Heinemann, Henrikki Pantsar

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

26 Citations (Scopus)


Fiber lasers in MOPA configuration are a very flexible tool for micromachining applications since they allow to independently adjust the pulse parameters such as pulse duration, repetition rates and pulse energy while maintaining a constant beam quality. The developed fiber laser provides an average power of 11 W and maximum pulse energy of 0.5 mJ for a wide range of pulse parameters at diffraction limited beam quality. Its pulse duration and repetition rate are continuously adjustable from 10 ns to cw and from 10kHz to 1MHz respectively. Ablation experiments were carried out on stainless steel, nickel and silicon with the goal of optimizing removal rates or surface finish using nanosecond pulses of different parameters. Maximum removal rates are achieved on all three materials using relatively similar pulse parameters. For silicon, pulse duration of 320ns at 100kHz and 45mJ resulted in optimum removal. In single shot experiments on silicon a significant influence of the pulse duration was found with a distinct optimum for removal rate and surface finish. The optimum intensity at the work piece is in the range of 35MW/cm2 to 70MW/cm2. Lower values are below the ablation threshold, while the plasma shielding effect limits considerable increases in removal rates for intensities exceeding 70MW/cm2.
Original languageEnglish
Title of host publicationPhotonics North 2007
EditorsJohn Armitage
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-0-8194-6962-5
Publication statusPublished - 2007
MoE publication typeA4 Article in a conference publication
EventPhotonics North 2007 - Ottawa, Canada
Duration: 4 Jun 20077 Jun 2007

Publication series

SeriesProceedings of SPIE


ConferencePhotonics North 2007


  • Ablation
  • Fiber laser
  • Flexible pulse parameter
  • Metal
  • Silicon


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