Micromachining with Tailored Pulse Parameters

Hans Herfurth; Tim Lauterborn; Stefan Heinemann; Henrikki Pantsar

doi:10.1109/CLEO.2007.4453740

Micromachining with Tailored Pulse Parameters

Hans Herfurth
, Tim Lauterborn
, Stefan Heinemann
, Henrikki Pantsar

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

Experiments on different metals and silicon were conducted to optimize removal rate or surface finish with nanosecond pulses of different parameters. A special fiber laser allows independent adjustment of pulse parameters while keeping beam quality constant.

Original language	English
Title of host publication	2007 Conference on Lasers and Electro-Optics (CLEO)
Publisher	IEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)	978-1-55752-834-6
DOIs	https://doi.org/10.1109/CLEO.2007.4453740
Publication status	Published - 2007
MoE publication type	A4 Article in a conference publication
Event	2007 Conference on Lasers and Electro-Optics (CLEO) - Baltimore, United States Duration: 6 May 2007 → 11 May 2007

Publication series

Series	Conference on Lasers and Electro-Optics (CLEO)
ISSN	2160-9004

Conference

Conference	2007 Conference on Lasers and Electro-Optics (CLEO)
Country/Territory	United States
City	Baltimore
Period	6/05/07 → 11/05/07

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Access to Document

10.1109/CLEO.2007.4453740

Cite this

@inproceedings{4a5dde94f8d1417aa3070d565e8413d8,

title = "Micromachining with Tailored Pulse Parameters",

abstract = "Experiments on different metals and silicon were conducted to optimize removal rate or surface finish with nanosecond pulses of different parameters. A special fiber laser allows independent adjustment of pulse parameters while keeping beam quality constant.",

author = "Hans Herfurth and Tim Lauterborn and Stefan Heinemann and Henrikki Pantsar",

year = "2007",

doi = "10.1109/CLEO.2007.4453740",

language = "English",

series = "Conference on Lasers and Electro-Optics (CLEO)",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

booktitle = "2007 Conference on Lasers and Electro-Optics (CLEO)",

address = "United States",

note = "2007 Conference on Lasers and Electro-Optics (CLEO) ; Conference date: 06-05-2007 Through 11-05-2007",

}

Herfurth, H, Lauterborn, T, Heinemann, S & Pantsar, H 2007, Micromachining with Tailored Pulse Parameters. in 2007 Conference on Lasers and Electro-Optics (CLEO)., PThC3, IEEE Institute of Electrical and Electronic Engineers, Conference on Lasers and Electro-Optics (CLEO), 2007 Conference on Lasers and Electro-Optics (CLEO), Baltimore, Maryland, United States, 6/05/07. https://doi.org/10.1109/CLEO.2007.4453740

Micromachining with Tailored Pulse Parameters. / Herfurth, Hans; Lauterborn, Tim; Heinemann, Stefan et al.
2007 Conference on Lasers and Electro-Optics (CLEO). IEEE Institute of Electrical and Electronic Engineers, 2007. PThC3 (Conference on Lasers and Electro-Optics (CLEO)).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Micromachining with Tailored Pulse Parameters

AU - Herfurth, Hans

AU - Lauterborn, Tim

AU - Heinemann, Stefan

AU - Pantsar, Henrikki

PY - 2007

Y1 - 2007

N2 - Experiments on different metals and silicon were conducted to optimize removal rate or surface finish with nanosecond pulses of different parameters. A special fiber laser allows independent adjustment of pulse parameters while keeping beam quality constant.

AB - Experiments on different metals and silicon were conducted to optimize removal rate or surface finish with nanosecond pulses of different parameters. A special fiber laser allows independent adjustment of pulse parameters while keeping beam quality constant.

U2 - 10.1109/CLEO.2007.4453740

DO - 10.1109/CLEO.2007.4453740

M3 - Conference article in proceedings

T3 - Conference on Lasers and Electro-Optics (CLEO)

BT - 2007 Conference on Lasers and Electro-Optics (CLEO)

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 2007 Conference on Lasers and Electro-Optics (CLEO)

Y2 - 6 May 2007 through 11 May 2007

ER -

Micromachining with Tailored Pulse Parameters

Abstract

Publication series

Conference

UN SDGs

Access to Document

Fingerprint

Cite this