Micromechanical actuators for spectroscopic measurements

Jarkko Antila, Hannu Kattelus, Heikki Saari

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    In this paper, advantages of surface micromachined silicon devices as parallel-moving planar actuators are described. These devices are especially intended for interferometric applications, such as Fourier transform spectroscopy (FTS). FTS has become a widely-used, high-precision method for analytical chemistry greatly because of its wide range of operation from UV to sub-millimeter wavelengths.
    Original languageEnglish
    Title of host publicationIEEE/LEOS International Conference on Optical MEMs and Their Applications
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages169-170
    ISBN (Print)0-7803-9278-7
    DOIs
    Publication statusPublished - 2005
    MoE publication typeA4 Article in a conference publication
    EventIEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland
    Duration: 1 Aug 20054 Aug 2005

    Publication series

    SeriesOptical MEMS, IEEE/LEOS International Conference on
    Volume2005
    ISSN2160-5033

    Conference

    ConferenceIEEE/LEOS International Conference on Optical MEMs and Their Applications
    CountryFinland
    CityOulu
    Period1/08/054/08/05

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    Cite this

    Antila, J., Kattelus, H., & Saari, H. (2005). Micromechanical actuators for spectroscopic measurements. In IEEE/LEOS International Conference on Optical MEMs and Their Applications (pp. 169-170). IEEE Institute of Electrical and Electronic Engineers . Optical MEMS, IEEE/LEOS International Conference on, Vol.. 2005 https://doi.org/10.1109/OMEMS.2005.1540132