In this paper, advantages of surface micromachined silicon devices as parallel-moving planar actuators are described. These devices are especially intended for interferometric applications, such as Fourier transform spectroscopy (FTS). FTS has become a widely-used, high-precision method for analytical chemistry greatly because of its wide range of operation from UV to sub-millimeter wavelengths.
|Optical MEMS, IEEE/LEOS International Conference on
|IEEE/LEOS International Conference on Optical MEMs and Their Applications
|1/08/05 → 4/08/05