Micromechanical actuators for spectroscopic measurements

Jarkko Antila; Hannu Kattelus; Heikki Saari

doi:10.1109/OMEMS.2005.1540132

Micromechanical actuators for spectroscopic measurements

Jarkko Antila, Hannu Kattelus, Heikki Saari

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

In this paper, advantages of surface micromachined silicon devices as parallel-moving planar actuators are described. These devices are especially intended for interferometric applications, such as Fourier transform spectroscopy (FTS). FTS has become a widely-used, high-precision method for analytical chemistry greatly because of its wide range of operation from UV to sub-millimeter wavelengths.

Original language	English
Title of host publication	IEEE/LEOS International Conference on Optical MEMs and Their Applications
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	169-170
ISBN (Print)	978-0-7803-9278-6
DOIs	https://doi.org/10.1109/OMEMS.2005.1540132
Publication status	Published - 2005
MoE publication type	A4 Article in a conference publication
Event	IEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland Duration: 1 Aug 2005 → 4 Aug 2005

Publication series

Series	Optical MEMS, IEEE/LEOS International Conference on
Volume	2005
ISSN	2160-5033

Conference

Conference	IEEE/LEOS International Conference on Optical MEMs and Their Applications
Country/Territory	Finland
City	Oulu
Period	1/08/05 → 4/08/05

Access to Document

10.1109/OMEMS.2005.1540132

Cite this

@inproceedings{649b26eb612046578f90af54228795d3,

title = "Micromechanical actuators for spectroscopic measurements",

abstract = "In this paper, advantages of surface micromachined silicon devices as parallel-moving planar actuators are described. These devices are especially intended for interferometric applications, such as Fourier transform spectroscopy (FTS). FTS has become a widely-used, high-precision method for analytical chemistry greatly because of its wide range of operation from UV to sub-millimeter wavelengths.",

author = "Jarkko Antila and Hannu Kattelus and Heikki Saari",

year = "2005",

doi = "10.1109/OMEMS.2005.1540132",

language = "English",

isbn = "978-0-7803-9278-6",

series = "Optical MEMS, IEEE/LEOS International Conference on",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

pages = "169--170",

booktitle = "IEEE/LEOS International Conference on Optical MEMs and Their Applications",

address = "United States",

note = "IEEE/LEOS International Conference on Optical MEMs and Their Applications ; Conference date: 01-08-2005 Through 04-08-2005",

}

Antila, J, Kattelus, H & Saari, H 2005, Micromechanical actuators for spectroscopic measurements. in IEEE/LEOS International Conference on Optical MEMs and Their Applications. IEEE Institute of Electrical and Electronic Engineers, Optical MEMS, IEEE/LEOS International Conference on, vol. 2005, pp. 169-170, IEEE/LEOS International Conference on Optical MEMs and Their Applications, Oulu, Finland, 1/08/05. https://doi.org/10.1109/OMEMS.2005.1540132

Micromechanical actuators for spectroscopic measurements. / Antila, Jarkko; Kattelus, Hannu; Saari, Heikki.
IEEE/LEOS International Conference on Optical MEMs and Their Applications. IEEE Institute of Electrical and Electronic Engineers, 2005. p. 169-170 (Optical MEMS, IEEE/LEOS International Conference on, Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Micromechanical actuators for spectroscopic measurements

AU - Antila, Jarkko

AU - Kattelus, Hannu

AU - Saari, Heikki

PY - 2005

Y1 - 2005

N2 - In this paper, advantages of surface micromachined silicon devices as parallel-moving planar actuators are described. These devices are especially intended for interferometric applications, such as Fourier transform spectroscopy (FTS). FTS has become a widely-used, high-precision method for analytical chemistry greatly because of its wide range of operation from UV to sub-millimeter wavelengths.

AB - In this paper, advantages of surface micromachined silicon devices as parallel-moving planar actuators are described. These devices are especially intended for interferometric applications, such as Fourier transform spectroscopy (FTS). FTS has become a widely-used, high-precision method for analytical chemistry greatly because of its wide range of operation from UV to sub-millimeter wavelengths.

U2 - 10.1109/OMEMS.2005.1540132

DO - 10.1109/OMEMS.2005.1540132

M3 - Conference article in proceedings

SN - 978-0-7803-9278-6

T3 - Optical MEMS, IEEE/LEOS International Conference on

SP - 169

EP - 170

BT - IEEE/LEOS International Conference on Optical MEMs and Their Applications

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE/LEOS International Conference on Optical MEMs and Their Applications

Y2 - 1 August 2005 through 4 August 2005

ER -

Micromechanical actuators for spectroscopic measurements

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