Micromechanical bulk acoustic wave resonator

Tomi Mattila (Corresponding author), Aarne Oja, Heikki Seppä, Olli Jaakkola, Jyrki Kiihamäki, Hannu Kattelus, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    23 Citations (Scopus)


    We describe the use of bulk acoustic mode in micromechanical silicon resonators operating at radio frequencies. Based on measured data from the fabricated resonator (f/sub r//spl sim/14 MHz, Q>100 000) we analyze the characteristic impedance and signal levels in such microdevices and compare the values with conventional quartz crystals. We find that the high impedance level of microresonators can be met with integration of the readout electronics and that silicon can accommodate significantly larger vibration energy densities than quartz. Based on the results, we anticipate a wide application range for the micromechanical bulk acoustic wave structures in future wireless communication devices and microsensors.
    Original languageEnglish
    Title of host publication2002 IEEE Ultrasonics Symposium Proceedings
    EditorsDonald E. Yuhas, Susan C. Schneider
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)978-0-7803-7583-3
    ISBN (Print)978-0-7803-7582-6
    Publication statusPublished - 2002
    MoE publication typeA4 Article in a conference publication
    Event2002 IEEE International Ultrasonics Symposium and Short Courses - Munich, Germany
    Duration: 8 Oct 200211 Oct 2002

    Publication series

    SeriesProceedings - IEEE Ultrasonics Symposium


    Conference2002 IEEE International Ultrasonics Symposium and Short Courses


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