Fingerprint Dive into the research topics of 'Micromechanical bulk acoustic wave resonator'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Micromechanical bulk acoustic wave resonator
Tomi Mattila (Corresponding author), Aarne Oja, Heikki Seppä, Olli Jaakkola, Jyrki Kiihamäki, Hannu Kattelus, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
21
Citations
(Scopus)