@inproceedings{2990f358886f4f75926472eedbf3f069,
title = "Micromechanical DC-voltage reference",
abstract = "Prototype of a novel DC voltage reference has been constructed. A characteristic voltage of an electrostatically actuated micromechanical silicon device provides the reference voltage. Its stability relies on elastic properties of monocrystalline silicon. The device is suited for batch fabrication and may prove more stable than Zener voltage references.",
author = "Oja, {A. S.} and J. Kyynarainen and H. Seppa and T. Lampola",
year = "2000",
month = dec,
day = "11",
language = "English",
series = "CPEM Digest (Conference on Precision Electromagnetic Measurements)",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
pages = "701--702",
booktitle = "CPEM Digest",
note = "Conference on Precision Electromagnetic Measurements, CPEM 2000 ; Conference date: 14-05-2000 Through 19-05-2000",
}