Micromechanical DC-voltage reference

A. S. Oja (Corresponding author), J. Kyynarainen, H. Seppa, T. Lampola

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

14 Citations (Scopus)


Prototype of a novel DC voltage reference has been constructed. A characteristic voltage of an electrostatically actuated micromechanical silicon device provides the reference voltage. Its stability relies on elastic properties of monocrystalline silicon. The device is suited for batch fabrication and may prove more stable than Zener voltage references.
Original languageEnglish
Title of host publicationCPEM Digest
Subtitle of host publicationConference on Precision Electromagnetic Measurements
Number of pages2
Publication statusPublished - 11 Dec 2000
MoE publication typeA4 Article in a conference publication
EventConference on Precision Electromagnetic Measurements, CPEM 2000 - Sydney, Australia
Duration: 14 May 200019 May 2000

Publication series

SeriesCPEM Digest (Conference on Precision Electromagnetic Measurements)


ConferenceConference on Precision Electromagnetic Measurements, CPEM 2000
CitySydney, Australia

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