Micromechanical DC-voltage reference

A. S. Oja (Corresponding author), J. Kyynarainen, H. Seppa, T. Lampola

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    15 Citations (Scopus)


    Prototype of a novel DC voltage reference has been constructed. A characteristic voltage of an electrostatically actuated micromechanical silicon device provides the reference voltage. Its stability relies on elastic properties of monocrystalline silicon. The device is suited for batch fabrication and may prove more stable than Zener voltage references.
    Original languageEnglish
    Title of host publicationCPEM Digest
    Subtitle of host publicationConference on Precision Electromagnetic Measurements
    Number of pages2
    Publication statusPublished - 11 Dec 2000
    MoE publication typeA4 Article in a conference publication
    EventConference on Precision Electromagnetic Measurements, CPEM 2000 - Sydney, Australia
    Duration: 14 May 200019 May 2000

    Publication series

    SeriesCPEM Digest (Conference on Precision Electromagnetic Measurements)


    ConferenceConference on Precision Electromagnetic Measurements, CPEM 2000
    CitySydney, Australia


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