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Micromechanical device
Mika Prunnila
(Inventor)
, Antti Jaakkola (Inventor)
,
Tuomas Pensala
(Inventor)
BA62 Microelectronics and quantum technology
BA6201 RF microsystems
Research output
:
Patent
›
Patent
Overview
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Keyphrases
Micromechanical Devices
100%
Semiconductor Element
100%
Patent Family
66%
Doping Agents
66%
Generalized Stiffness
66%
Temperature Range
33%
Material Properties
33%
Resonator
33%
Doping Concentration
33%
Temperature Sensitivity
33%
Relative Volume
33%
Crystal Orientation
33%
Two-region
33%
Temperature Drift
33%
INIS
devices
100%
semiconductor materials
75%
stiffness
50%
patents
50%
inventions
50%
concentration
25%
sensitivity
25%
volume
25%
crystals
25%
temperature range
25%
orientation
25%
resonators
25%
Material Science
Materials Property
100%
Crystal Orientation
100%
Resonator
100%