Micromechanical mirror for Fourier transform interferometry

Jarkko Antila, Aarne Oja, Heikki Saari

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationNorthern Optics 2003
    EditorsEero Noponen
    PublisherTeknillinen korkeakoulu
    ISBN (Print)951-22-6596-6
    Publication statusPublished - 2003
    MoE publication typeNot Eligible
    EventNorthern Optics 2003: Joint Conference of the Optical Societies of Denmark, Finland, Norway and Sweden - Espoo, Finland
    Duration: 16 Jun 200318 Jun 2003

    Publication series

    SeriesHelsinki University of Technology Publications in Engineering Physics A
    Number822
    ISSN1456-3320

    Conference

    ConferenceNorthern Optics 2003
    CountryFinland
    CityEspoo
    Period16/06/0318/06/03

    Keywords

    • micromechanical
    • MEMS
    • interferometer
    • fourier
    • FTS

    Cite this