@inbook{a99e9b1e038349d1a355f0ef333e2608,
title = "Micromechanical mirror for Fourier transform interferometry",
keywords = "micromechanical, MEMS, interferometer, fourier, FTS",
author = "Jarkko Antila and Aarne Oja and Heikki Saari",
note = "Project code: T2SU00083; Northern Optics 2003 : Joint Conference of the Optical Societies of Denmark, Finland, Norway and Sweden ; Conference date: 16-06-2003 Through 18-06-2003",
year = "2003",
language = "English",
isbn = "951-22-6596-6",
series = "Helsinki University of Technology Publications in Engineering Physics A",
publisher = "Teknillinen korkeakoulu",
number = "822",
editor = "Eero Noponen",
booktitle = "Northern Optics 2003",
address = "Finland",
}