@inproceedings{22e3d23d6cbe4a3ea9e4f5635da47ff7,
title = "Micromechanical mirror for Fourier transform interferometry",
keywords = "micromechanical, MEMS, interferometer, fourier, FTS",
author = "Jarkko Antila and Aarne Oja and Heikki Saari",
note = "Project code: T2SU00083 CD-ROM proceedings, no ISBN/ISSN found; 4th ESA Round Table on Micro/Nano Technologies for Space ; Conference date: 20-05-2003 Through 22-05-2003",
year = "2003",
language = "English",
pages = "687--694",
booktitle = "Proceedings of 4th Round Table on Micro/Nano Technologies for Space",
publisher = "European Space Agency (ESA)",
address = "France",
}