Micromechanical radio frequency systems

Markku Åberg; Markku Jenu; Hannu Kattelus; Jaakko Lenkkeri; Heikki Seppä; Hannu Sipola; Timo Varpula; Tauno Vähä-Heikkilä

Micromechanical radio frequency systems

Markku Åberg, Markku Jenu, Hannu Kattelus, Jaakko Lenkkeri, Heikki Seppä, Hannu Sipola, Timo Varpula, Tauno Vähä-Heikkilä

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional

Original language	English
Title of host publication	Communications Technologies
Subtitle of host publication	The VTT Roadmaps
Place of Publication	Espoo
Publisher	VTT Technical Research Centre of Finland
Chapter	2
Pages	27 - 43
ISBN (Electronic)	951-38-6053-1
ISBN (Print)	951-38-6050-7
Publication status	Published - 2002
MoE publication type	D2 Article in professional manuals or guides or professional information systems or text book material

Publication series

Series	VTT Tiedotteita - Research Notes
Number	2146
ISSN	1235-0605

Access to Document

https://publications.vtt.fi/pdf/tiedotteet/2002/T2146.pdf

Cite this

@inbook{848a2740fc564ad1a25f796f0a6e7851,

title = "Micromechanical radio frequency systems",

author = "Markku {\AA}berg and Markku Jenu and Hannu Kattelus and Jaakko Lenkkeri and Heikki Sepp{\"a} and Hannu Sipola and Timo Varpula and Tauno V{\"a}h{\"a}-Heikkil{\"a}",

year = "2002",

language = "English",

isbn = "951-38-6050-7",

series = "VTT Tiedotteita - Research Notes",

publisher = "VTT Technical Research Centre of Finland",

number = "2146",

pages = "27 -- 43",

booktitle = "Communications Technologies",

address = "Finland",

}

TY - CHAP

T1 - Micromechanical radio frequency systems

AU - Åberg, Markku

AU - Jenu, Markku

AU - Kattelus, Hannu

AU - Lenkkeri, Jaakko

AU - Seppä, Heikki

AU - Sipola, Hannu

AU - Varpula, Timo

AU - Vähä-Heikkilä, Tauno

PY - 2002

Y1 - 2002

M3 - Chapter or book article

SN - 951-38-6050-7

T3 - VTT Tiedotteita - Research Notes

SP - 27

EP - 43

BT - Communications Technologies

PB - VTT Technical Research Centre of Finland

CY - Espoo

ER -