Micromechanical resonator

Antti Jaakkola (Inventor), Panu Pekko (Inventor)

    Research output: PatentPatent

    Abstract

    The present disclosure describes a micromechanical resonator comprising a resonator element (40) having a length (l1) and a width (w1) that is perpendicular to the length. The resonator element has a length-to-width aspect ratio in a range of 1.8 to 2.2. The resonator element is suspended to a support structure with two or more anchors (41, 43). Each of the two or more anchors is attached to a first location or a second location. The first location is at a shorter side (42) of the resonator element. The first location divides the width (w1) of the resonator element into a larger portion (w3) and a smaller portion (w2) such that a ratio between said smaller portion (w2) and the whole width (w1) is in a range of 0.10 to 0.28. The second location is at a longer side (44). The second location divides the length (l1) of the resonator element into a larger portion (l3) and a smaller portion (l2) such that a ratio between said smaller portion (l2) and the whole length (l1) is in a range of 0.36 to 0.48.

    Patent family as of 14.12.2021
    CN109417373 A 20190301 CN201780040389 20170629      
    DE602017009446 D1 20191224 DE201760009446T 20170629      
    EP3479477 A1 20190508 EP20170746152 20170629      
    EP3479477 B1 20191204 EP20170746152 20170629      
    FI127787 B 20190228 FI20160005553 20160701      
    FI20165553 A 20180102 FI20160005553 20160701      
    JP2019525548 T2 20190905 JP20180568200T 20170629      
    KR20190026784 A 20190313 KR20197002410 20170629      
    US10931255 BB 20210223 US20180313655 20170629      
    US2019173450 AA 20190606 US20180313655 20170629      
    WO18002439 A1 20180104 WO2017FI50486 20170629

    Link to currentpatent family on right 

    Original languageEnglish
    Patent numberEP3479477
    IPCH03H 9/ 02 A I
    Priority date29/06/17
    Publication statusPublished - 8 May 2019
    MoE publication typeH1 Granted patent

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