Micromechanical resonator and method for manufacturing thereof

Antti Jaakkola; Tuomas Pensala

Micromechanical resonator and method for manufacturing thereof

Antti Jaakkola (Inventor), Tuomas Pensala (Inventor)

BA6201 MEMS

Research output: Patent › Patent

Abstract

The invention relates to a temperature compensated micromechanical resonator and method of manufacturing thereof. The resonator comprises a resonator element comprising a semiconductor crystal structure, which is doped so as to reduce its temperature coefficient of frequency, transducer means for exciting to the resonator element a vibrational mode. According to the invention the crystal orientation and shape of the resonator element are chosen to allow for a shear mode having a saddle point to be excited to the resonator element, and said transducer means are adapted to excite said shear mode to the resonator element. Accurate micromechanical resonators with now temperature drift can be achieved by means of the invention.

Patent family as of 27.9.2021
DE602011008653 D1 20140904 DE201160008653T 20110811
EP2603976 A1 20130619 EP20110816145 20110811
EP2603976 A4 20130619 EP20110816145 20110811
EP2603976 B1 20140723 EP20110816145 20110811
FI20105851 A 20120214 FI20100005851 20100813
FI20105851 A0 20100813 FI20100005851 20100813
US2013187724 AA 20130725 US20110816493 20110811
US9071226 BB 20150630 US20110816493 20110811
WO12020172 A1 20120216 WO2011FI50710 20110811

Link to current patent family on right

Original language	English
Patent number	EP2603976
IPC	B81B 3/ 00 A N
Priority date	11/08/11
Publication status	Published - 19 Jun 2013
MoE publication type	H1 Granted patent

Cite this

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abstract = "The invention relates to a temperature compensated micromechanical resonator and method of manufacturing thereof. The resonator comprises a resonator element comprising a semiconductor crystal structure, which is doped so as to reduce its temperature coefficient of frequency, transducer means for exciting to the resonator element a vibrational mode. According to the invention the crystal orientation and shape of the resonator element are chosen to allow for a shear mode having a saddle point to be excited to the resonator element, and said transducer means are adapted to excite said shear mode to the resonator element. Accurate micromechanical resonators with now temperature drift can be achieved by means of the invention.Patent family as of 27.9.2021DE602011008653 D1 20140904 DE201160008653T 20110811 EP2603976 A1 20130619 EP20110816145 20110811 EP2603976 A4 20130619 EP20110816145 20110811 EP2603976 B1 20140723 EP20110816145 20110811 FI20105851 A 20120214 FI20100005851 20100813 FI20105851 A0 20100813 FI20100005851 20100813 US2013187724 AA 20130725 US20110816493 20110811 US9071226 BB 20150630 US20110816493 20110811 WO12020172 A1 20120216 WO2011FI50710 20110811Link to current patent family on right ",

author = "Antti Jaakkola and Tuomas Pensala",

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AU - Pensala, Tuomas

PY - 2013/6/19

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N2 - The invention relates to a temperature compensated micromechanical resonator and method of manufacturing thereof. The resonator comprises a resonator element comprising a semiconductor crystal structure, which is doped so as to reduce its temperature coefficient of frequency, transducer means for exciting to the resonator element a vibrational mode. According to the invention the crystal orientation and shape of the resonator element are chosen to allow for a shear mode having a saddle point to be excited to the resonator element, and said transducer means are adapted to excite said shear mode to the resonator element. Accurate micromechanical resonators with now temperature drift can be achieved by means of the invention.Patent family as of 27.9.2021DE602011008653 D1 20140904 DE201160008653T 20110811 EP2603976 A1 20130619 EP20110816145 20110811 EP2603976 A4 20130619 EP20110816145 20110811 EP2603976 B1 20140723 EP20110816145 20110811 FI20105851 A 20120214 FI20100005851 20100813 FI20105851 A0 20100813 FI20100005851 20100813 US2013187724 AA 20130725 US20110816493 20110811 US9071226 BB 20150630 US20110816493 20110811 WO12020172 A1 20120216 WO2011FI50710 20110811Link to current patent family on right

AB - The invention relates to a temperature compensated micromechanical resonator and method of manufacturing thereof. The resonator comprises a resonator element comprising a semiconductor crystal structure, which is doped so as to reduce its temperature coefficient of frequency, transducer means for exciting to the resonator element a vibrational mode. According to the invention the crystal orientation and shape of the resonator element are chosen to allow for a shear mode having a saddle point to be excited to the resonator element, and said transducer means are adapted to excite said shear mode to the resonator element. Accurate micromechanical resonators with now temperature drift can be achieved by means of the invention.Patent family as of 27.9.2021DE602011008653 D1 20140904 DE201160008653T 20110811 EP2603976 A1 20130619 EP20110816145 20110811 EP2603976 A4 20130619 EP20110816145 20110811 EP2603976 B1 20140723 EP20110816145 20110811 FI20105851 A 20120214 FI20100005851 20100813 FI20105851 A0 20100813 FI20100005851 20100813 US2013187724 AA 20130725 US20110816493 20110811 US9071226 BB 20150630 US20110816493 20110811 WO12020172 A1 20120216 WO2011FI50710 20110811Link to current patent family on right

UR - https://worldwide.espacenet.com/patent/search/family/042669357/publication/EP2603976A1?q=EP2603976

M3 - Patent

M1 - EP2603976

ER -

Micromechanical resonator and method for manufacturing thereof

Abstract

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