Micromechanical resonator array and method for manufacturing thereof

Antti Jaakkola; Tuomas Pensala; Jyrki Kiihamäki

Micromechanical resonator array and method for manufacturing thereof

Antti Jaakkola (Inventor), Tuomas Pensala (Inventor), Jyrki Kiihamäki (Inventor)

BA6201 MEMS

Research output: Patent › Patent

Abstract

The invention relates to a microelectromechanical resonators and a method of manufacturing thereof. The resonator comprises at least two resonator elements made from semiconductor material, the resonator elements being arranged laterally with respect to each other as an array, at least one transducer element coupled to said resonator elements and capable of exciting a resonance mode to the resonator elements. According to the invention, said at least one transducer element is a piezoelectric transducer element arranged laterally with respect to the at least two resonator elements between the at least two resonator elements and adapted to excite to the resonator elements as said resonance mode a resonance mode whose resonance frequency is dependent essentially only on the c44 elastic parameter of the elastic modulus of the material of the resonator elements. By means of the invention, electrostatic actuation and problems associated therewith can be avoided and accurate resonators can be manufactured.

Patent family as of 27.9.2021
DE602011012433 D1 20150129 DE201160012433T 20110811
EP2603975 A1 20130619 EP20110816146 20110811
EP2603975 A4 20130821 EP20110816146 20110811
EP2603975 B1 20141217 EP20110816146 20110811
FI124453 B 20140915 FI20100005849 20100813
FI20105849 A 20120214 FI20100005849 20100813
FI20105849 A0 20100813 FI20100005849 20100813
US2012038431 AA 20120216 US20110209099 20110812
US8786166 BB 20140722 US20110209099 20110812
WO12020173 A1 20120216 WO2011FI50711 20110811

Link to current patent family on right

Original language	English
Patent number	EP2603975
IPC	H03H 9/ 50 A I
Priority date	11/08/11
Publication status	Published - 19 Jun 2013
MoE publication type	H1 Granted patent

Cite this

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abstract = "The invention relates to a microelectromechanical resonators and a method of manufacturing thereof. The resonator comprises at least two resonator elements made from semiconductor material, the resonator elements being arranged laterally with respect to each other as an array, at least one transducer element coupled to said resonator elements and capable of exciting a resonance mode to the resonator elements. According to the invention, said at least one transducer element is a piezoelectric transducer element arranged laterally with respect to the at least two resonator elements between the at least two resonator elements and adapted to excite to the resonator elements as said resonance mode a resonance mode whose resonance frequency is dependent essentially only on the c44 elastic parameter of the elastic modulus of the material of the resonator elements. By means of the invention, electrostatic actuation and problems associated therewith can be avoided and accurate resonators can be manufactured.Patent family as of 27.9.2021DE602011012433 D1 20150129 DE201160012433T 20110811 EP2603975 A1 20130619 EP20110816146 20110811 EP2603975 A4 20130821 EP20110816146 20110811 EP2603975 B1 20141217 EP20110816146 20110811 FI124453 B 20140915 FI20100005849 20100813 FI20105849 A 20120214 FI20100005849 20100813 FI20105849 A0 20100813 FI20100005849 20100813 US2012038431 AA 20120216 US20110209099 20110812 US8786166 BB 20140722 US20110209099 20110812 WO12020173 A1 20120216 WO2011FI50711 20110811Link to current patent family on right ",

author = "Antti Jaakkola and Tuomas Pensala and Jyrki Kiiham{\"a}ki",

year = "2013",

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AU - Jaakkola, Antti

AU - Pensala, Tuomas

AU - Kiihamäki, Jyrki

PY - 2013/6/19

Y1 - 2013/6/19

N2 - The invention relates to a microelectromechanical resonators and a method of manufacturing thereof. The resonator comprises at least two resonator elements made from semiconductor material, the resonator elements being arranged laterally with respect to each other as an array, at least one transducer element coupled to said resonator elements and capable of exciting a resonance mode to the resonator elements. According to the invention, said at least one transducer element is a piezoelectric transducer element arranged laterally with respect to the at least two resonator elements between the at least two resonator elements and adapted to excite to the resonator elements as said resonance mode a resonance mode whose resonance frequency is dependent essentially only on the c44 elastic parameter of the elastic modulus of the material of the resonator elements. By means of the invention, electrostatic actuation and problems associated therewith can be avoided and accurate resonators can be manufactured.Patent family as of 27.9.2021DE602011012433 D1 20150129 DE201160012433T 20110811 EP2603975 A1 20130619 EP20110816146 20110811 EP2603975 A4 20130821 EP20110816146 20110811 EP2603975 B1 20141217 EP20110816146 20110811 FI124453 B 20140915 FI20100005849 20100813 FI20105849 A 20120214 FI20100005849 20100813 FI20105849 A0 20100813 FI20100005849 20100813 US2012038431 AA 20120216 US20110209099 20110812 US8786166 BB 20140722 US20110209099 20110812 WO12020173 A1 20120216 WO2011FI50711 20110811Link to current patent family on right

AB - The invention relates to a microelectromechanical resonators and a method of manufacturing thereof. The resonator comprises at least two resonator elements made from semiconductor material, the resonator elements being arranged laterally with respect to each other as an array, at least one transducer element coupled to said resonator elements and capable of exciting a resonance mode to the resonator elements. According to the invention, said at least one transducer element is a piezoelectric transducer element arranged laterally with respect to the at least two resonator elements between the at least two resonator elements and adapted to excite to the resonator elements as said resonance mode a resonance mode whose resonance frequency is dependent essentially only on the c44 elastic parameter of the elastic modulus of the material of the resonator elements. By means of the invention, electrostatic actuation and problems associated therewith can be avoided and accurate resonators can be manufactured.Patent family as of 27.9.2021DE602011012433 D1 20150129 DE201160012433T 20110811 EP2603975 A1 20130619 EP20110816146 20110811 EP2603975 A4 20130821 EP20110816146 20110811 EP2603975 B1 20141217 EP20110816146 20110811 FI124453 B 20140915 FI20100005849 20100813 FI20105849 A 20120214 FI20100005849 20100813 FI20105849 A0 20100813 FI20100005849 20100813 US2012038431 AA 20120216 US20110209099 20110812 US8786166 BB 20140722 US20110209099 20110812 WO12020173 A1 20120216 WO2011FI50711 20110811Link to current patent family on right

UR - https://worldwide.espacenet.com/patent/search/family/042669355/publication/EP2603975A1?q=EP2603975

M3 - Patent

M1 - EP2603975

ER -

Micromechanical resonator array and method for manufacturing thereof

Abstract

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