Micromechanical resonator based on SOI structure

Pekka Seppälä, Jyrki Kiihamäki, Aarne Oja, Timo Varpula, Kari Vepsäläinen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publication10th Micromechanics Europe Workshop MME'99: Proceedings
Subtitle of host publicationGif-sur-Yvette, France, 27-28 September 1999
Place of PublicationOrsay
PublisherInstitut d'Electronique Fondamentale, Université Paris-Sud
Pages101-104
Publication statusPublished - 1999
MoE publication typeNot Eligible

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