Micromechanical resonator based on SOI structure

Pekka Seppälä; Jyrki Kiihamäki; Aarne Oja; Timo Varpula; Kari Vepsäläinen

Micromechanical resonator based on SOI structure

Pekka Seppälä, Jyrki Kiihamäki, Aarne Oja, Timo Varpula, Kari Vepsäläinen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	10th Micromechanics Europe Workshop MME'99: Proceedings
Subtitle of host publication	Gif-sur-Yvette, France, 27-28 September 1999
Place of Publication	Orsay
Publisher	Institut d'Electronique Fondamentale, Université Paris-Sud
Pages	101-104
Publication status	Published - 1999
MoE publication type	Not Eligible

Cite this

@inproceedings{5c3a70f516914c5da78c86761cddf190,

title = "Micromechanical resonator based on SOI structure",

author = "Pekka Sepp{\"a}l{\"a} and Jyrki Kiiham{\"a}ki and Aarne Oja and Timo Varpula and Kari Veps{\"a}l{\"a}inen",

note = "Project code: E6SU00342 No ISBN/ISSN found for the proceedings",

year = "1999",

language = "English",

pages = "101--104",

booktitle = "10th Micromechanics Europe Workshop MME'99: Proceedings",

publisher = "Institut d'Electronique Fondamentale, Universit{\'e} Paris-Sud",

address = "France",

}

Micromechanical resonator based on SOI structure. / Seppälä, Pekka; Kiihamäki, Jyrki; Oja, Aarne et al.
10th Micromechanics Europe Workshop MME'99: Proceedings: Gif-sur-Yvette, France, 27-28 September 1999. Orsay: Institut d'Electronique Fondamentale, Université Paris-Sud, 1999. p. 101-104.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - Micromechanical resonator based on SOI structure

AU - Seppälä, Pekka

AU - Kiihamäki, Jyrki

AU - Oja, Aarne

AU - Varpula, Timo

AU - Vepsäläinen, Kari

N1 - Project code: E6SU00342 No ISBN/ISSN found for the proceedings

PY - 1999

Y1 - 1999

M3 - Conference article in proceedings

SP - 101

EP - 104

BT - 10th Micromechanics Europe Workshop MME'99: Proceedings

PB - Institut d'Electronique Fondamentale, Université Paris-Sud

CY - Orsay

ER -