@inproceedings{5c3a70f516914c5da78c86761cddf190,
title = "Micromechanical resonator based on SOI structure",
author = "Pekka Sepp{\"a}l{\"a} and Jyrki Kiiham{\"a}ki and Aarne Oja and Timo Varpula and Kari Veps{\"a}l{\"a}inen",
note = "Project code: E6SU00342 No ISBN/ISSN found for the proceedings",
year = "1999",
language = "English",
pages = "101--104",
booktitle = "10th Micromechanics Europe Workshop MME'99: Proceedings",
publisher = "Institut d'Electronique Fondamentale, Universit{\'e} Paris-Sud",
address = "France",
}