Micromechanical resonators: fabrication and characterization

Pekka Seppälä, Olli Jaakkola, Jani Karttunen, Jyrki Kiihamäki, Tuomas Lamminmäki, Tomi Mattila, Aarne Oja, Kaius Ruokonen, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the XXXIV Annual Conference of the Finnish Physical Society
    PublisherHelsinki University of Technology
    ISBN (Print)951-22-4897-2
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication
    EventXXXIV Annual Conference of the Finnish Physical Society - Espoo, Finland
    Duration: 9 Mar 200011 Mar 2000

    Publication series

    SeriesHelsinki University of Technology Publications in Engineering Physics A
    Volume797
    ISSN1456-3320

    Conference

    ConferenceXXXIV Annual Conference of the Finnish Physical Society
    CountryFinland
    CityEspoo
    Period9/03/0011/03/00

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