Micromechanical resonators: fabrication and characterization

Pekka Seppälä, Olli Jaakkola, Jani Karttunen, Jyrki Kiihamäki, Tuomas Lamminmäki, Tomi Mattila, Aarne Oja, Kaius Ruokonen, Heikki Seppä

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publicationProceedings of the XXXIV Annual Conference of the Finnish Physical Society
PublisherHelsinki University of Technology
ISBN (Print)951-22-4897-2
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication
EventXXXIV Annual Conference of the Finnish Physical Society - Espoo, Finland
Duration: 9 Mar 200011 Mar 2000

Publication series

SeriesHelsinki University of Technology Publications in Engineering Physics A
Volume797
ISSN1456-3320

Conference

ConferenceXXXIV Annual Conference of the Finnish Physical Society
CountryFinland
CityEspoo
Period9/03/0011/03/00

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