Micromechanical resonators: fabrication and characterization

Pekka Seppälä; Olli Jaakkola; Jani Karttunen; Jyrki Kiihamäki; Tuomas Lamminmäki; Tomi Mattila; Aarne Oja; Kaius Ruokonen; Heikki Seppä

Micromechanical resonators: fabrication and characterization

Pekka Seppälä, Olli Jaakkola, Jani Karttunen, Jyrki Kiihamäki, Tuomas Lamminmäki, Tomi Mattila, Aarne Oja, Kaius Ruokonen, Heikki Seppä

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Proceedings of the XXXIV Annual Conference of the Finnish Physical Society
Publisher	Helsinki University of Technology
ISBN (Print)	951-22-4897-2
Publication status	Published - 2000
MoE publication type	A4 Article in a conference publication
Event	XXXIV Annual Conference of the Finnish Physical Society - Espoo, Finland Duration: 9 Mar 2000 → 11 Mar 2000

Publication series

Series	Helsinki University of Technology Publications in Engineering Physics A
Volume	797
ISSN	1456-3320

Conference

Conference	XXXIV Annual Conference of the Finnish Physical Society
Country/Territory	Finland
City	Espoo
Period	9/03/00 → 11/03/00

Cite this

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title = "Micromechanical resonators: fabrication and characterization",

author = "Pekka Sepp{\"a}l{\"a} and Olli Jaakkola and Jani Karttunen and Jyrki Kiiham{\"a}ki and Tuomas Lamminm{\"a}ki and Tomi Mattila and Aarne Oja and Kaius Ruokonen and Heikki Sepp{\"a}",

year = "2000",

language = "English",

isbn = "951-22-4897-2",

series = "Helsinki University of Technology Publications in Engineering Physics A",

publisher = "Helsinki University of Technology",

booktitle = "Proceedings of the XXXIV Annual Conference of the Finnish Physical Society",

address = "Finland",

note = "XXXIV Annual Conference of the Finnish Physical Society ; Conference date: 09-03-2000 Through 11-03-2000",

}

Seppälä, P, Jaakkola, O, Karttunen, J, Kiihamäki, J, Lamminmäki, T, Mattila, T, Oja, A, Ruokonen, K & Seppä, H 2000, Micromechanical resonators: fabrication and characterization. in Proceedings of the XXXIV Annual Conference of the Finnish Physical Society., 149, Helsinki University of Technology, Helsinki University of Technology Publications in Engineering Physics A, vol. 797, XXXIV Annual Conference of the Finnish Physical Society, Espoo, Finland, 9/03/00.

Micromechanical resonators: fabrication and characterization. / Seppälä, Pekka; Jaakkola, Olli; Karttunen, Jani et al.
Proceedings of the XXXIV Annual Conference of the Finnish Physical Society. Helsinki University of Technology, 2000. 149 (Helsinki University of Technology Publications in Engineering Physics A, Vol. 797).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Micromechanical resonators: fabrication and characterization

AU - Seppälä, Pekka

AU - Jaakkola, Olli

AU - Karttunen, Jani

AU - Kiihamäki, Jyrki

AU - Lamminmäki, Tuomas

AU - Mattila, Tomi

AU - Oja, Aarne

AU - Ruokonen, Kaius

AU - Seppä, Heikki

PY - 2000

Y1 - 2000

M3 - Conference article in proceedings

SN - 951-22-4897-2

T3 - Helsinki University of Technology Publications in Engineering Physics A

BT - Proceedings of the XXXIV Annual Conference of the Finnish Physical Society

PB - Helsinki University of Technology

T2 - XXXIV Annual Conference of the Finnish Physical Society

Y2 - 9 March 2000 through 11 March 2000

ER -