@inproceedings{c7593e5060cc4b44b0e81b8ade9ba9b5,
title = "Micromechanical RMS-to-DC converter",
abstract = "A micromechanical silicon device is designed for use as precise batch fabricated AC voltage to DC voltage converter. This converter measures the differences of the electrostatic RMS forces induced by AC and DC voltages. The operating principle of the device demonstrates a strong polarity dependence. The output voltage is observed about 0.8 V different depending on the polarity of the DC voltage. The data on other micromechanical components does not show significant polarity dependence. A systematic error is induced in the output voltage of the prototype converter.",
author = "J. Kyynarainen and Oja, {A. S.} and H. Seppa",
year = "2000",
month = dec,
day = "11",
language = "English",
series = "CPEM Digest (Conference on Precision Electromagnetic Measurements)",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
pages = "699--700",
booktitle = "CPEM Digest",
note = "Conference on Precision Electromagnetic Measurements, CPEM 2000 ; Conference date: 14-05-2000 Through 19-05-2000",
}