Micromechanical RMS-to-DC converter

J. Kyynarainen, A. S. Oja, H. Seppa

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    5 Citations (Scopus)


    A micromechanical silicon device is designed for use as precise batch fabricated AC voltage to DC voltage converter. This converter measures the differences of the electrostatic RMS forces induced by AC and DC voltages. The operating principle of the device demonstrates a strong polarity dependence. The output voltage is observed about 0.8 V different depending on the polarity of the DC voltage. The data on other micromechanical components does not show significant polarity dependence. A systematic error is induced in the output voltage of the prototype converter.
    Original languageEnglish
    Title of host publicationCPEM Digest
    Subtitle of host publicationConference on Precision Electromagnetic Measurements
    Number of pages2
    Publication statusPublished - 11 Dec 2000
    MoE publication typeA4 Article in a conference publication
    EventConference on Precision Electromagnetic Measurements, CPEM 2000 - Sydney, Australia
    Duration: 14 May 200019 May 2000

    Publication series

    SeriesCPEM Digest (Conference on Precision Electromagnetic Measurements)


    ConferenceConference on Precision Electromagnetic Measurements, CPEM 2000
    CitySydney, Australia


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