Micromechanical Sensor, Sensor Array and Method

Heikki Seppa (Inventor), Kirsi Tappura (Inventor), Jussi Tuppurainen (Inventor), Tomi Mattila (Inventor), Ari Alastalo (Inventor), Hannu Helle (Inventor), Aarne Oja (Inventor)

Research output: PatentPatent


The present invention relates to a micromechanical sensor for analyzing liquid samples and an array of such sensors. The invention also concerns a method for sensing liquid samples and the use of longitudinal bulk acoustic waves for analyzing liquid phase samples micromechanically. The sensor comprises a body and a planar wave guide portion spaced from the body. At least one electro-mechanical transducer element are used for excitation of longitudinal bulk acoustic waves to the wave guide portion in response to electrical actuation and for converting acoustic waves into electrical signals. The wave guide portion is provided with a sample-receiving zone onto which the sample can be introduced. By means of the invention, the sensitivity of micromechanical liquid sensors can be improved.

Patent family as of 30.8.2021
CN101218503 A 20080709 CN200680024868 20060704       
CN101218503 B 20120104 CN200680024868 20060704
FI118829 B 20080331 FI20050000739 20050708     
FI20050739 A 20070109 FI20050000739 20050708 
FI20050739 A0 20050708 FI20050000739 20050708     
GB200801930 A0 20080312 GB20080001930 20060704     
GB2442415 A1 20080402 GB20080001930 20060704     
GB2442415 B2 20090527 GB20080001930 20060704     
HK1118906 A1 20090220 HK20080110342 20080918     
HK1118906 A3 20090220 HK20080110342 20080918     
HK1118906 B 20091106 HK20080110342 20080918     
US2009277271 AA 20091112 US20060988417 20060704     
US8136403 BB 20120320 US20060988417 20060704     
WO07006843 A1 20070118 WO2006FI00240 20060704

Link to current patent family on right 

Original languageEnglish
Patent numberUS2009277271
IPCG01N 29/ 036 A I
Priority date4/07/06
Publication statusPublished - 12 Nov 2009
MoE publication typeH1 Granted patent


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