Micromechanical silicon sensors

Heikki Seppä, Aarne Oja

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional

Original language	English
Title of host publication	Automation Technology Review 1998
Editors	Väinö Kelhä
Publisher	VTT Technical Research Centre of Finland
Pages	42-47
Publication status	Published - 1998
MoE publication type	D2 Article in professional manuals or guides or professional information systems or text book material

Automation technology review 1998
Kelhä, V. (Editor), 1998, Espoo: VTT Technical Research Centre of Finland. 86 p.
Research output: Book/Report › Report

Cite this

@inbook{142aba8d55824887afed06e502c9d826,

title = "Micromechanical silicon sensors",

author = "Heikki Sepp{\"a} and Aarne Oja",

year = "1998",

language = "English",

pages = "42--47",

editor = "V{\"a}in{\"o} Kelh{\"a}",

booktitle = "Automation Technology Review 1998",

publisher = "VTT Technical Research Centre of Finland",

address = "Finland",

}