Micromechanical silicon sensors

Heikki Seppä, Aarne Oja

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional

1 Report

1 results

1998

Automation technology review 1998
Kelhä, V. (Editor), 1998, Espoo: VTT Technical Research Centre of Finland. 86 p.
Research output: Book/Report › Report