Micromechanical tunable fabry-perot interferometer, an intermediate product, and a method for producing the same

Martti Blomberg (Inventor)

Research output: PatentPatent


The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Producing prior art interferometers includes a risk of deterioration of mirrors during the etching of the sacrificial layer (123). According to the solution according to the invention at least one layer (103, 105, 114, 116) of the mirrors is made of silicon-rich silicon nitride. In the inventive Fabry-Perot interferometer it is possible to avoid or reduce using silicon oxide in the mirror layers whereby the risk of deterioration of the mirrors is reduced. It is also possible to use mirror surfaces with higher roughness, whereby the risk of the mirrors sticking to each other is reduced.

Patent family as of 9.9.2021
CN102449447 A 20120509 CN201080023427 20100528      
CN102449447 B 20140618 CN201080023427 20100528      
EP2438411 A1 20120411 EP20100780112 20100528      
EP2438411 A4 20150506 EP20100780112 20100528      
FI124072 B 20140314 FI20090005602 20090529      
FI20095602 A 20101130 FI20090005602 20090529      
FI20095602 A0 20090529 FI20090005602 20090529      
JP2012528345 T2 20121112 JP20120512412T 20100528      
JP5714570 B2 20150507 JP20120512412T 20100528      
US2012050751 AA 20120301 US20100319337 20100528      
US9235043 BB 20160112 US20100319337 20100528      
WO10136654 A1 20101202 WO2010FI50434 20100528

Patent family as of 10.9.2021

Original languageEnglish
Patent numberUS2012050751
IPCH01L 21/ 02 A I
Priority date28/05/10
Publication statusPublished - 1 Mar 2012
MoE publication typeH1 Granted patent


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