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Micromechanical tunable Fabry-Perot interferometer and a method for producing the same
Mikko Tuohiniemi (Inventor)
VTT Technical Research Centre of Finland
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Patent
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Patent
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Keyphrases
Fabry-Perot Interferometer
100%
Patent Family
100%
Micromechanics
100%
Movable Mirror
100%
Stiffness
50%
Production Stage
50%
Control Voltage
50%
Interferometer
50%
Micro-opto-electro-mechanical Systems (MOEMS)
50%
Electrically Tunable
50%
Mirror Layers
50%
Low Control Voltage
50%
Control Electrodes
50%
Circular Geometry
50%
INIS
mirrors
100%
fabry-perot interferometer
100%
control
75%
production
50%
voltage
50%
patents
50%
electrodes
50%
anchoring
50%
layers
25%
solutions
25%
geometry
25%
stiffness
25%
interferometers
25%
flat mirrors
25%
Material Science
Interferometer
100%