Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same

Jarkko Antila (Inventor), Martti Blomberg (Inventor)

Research output: PatentPatent


The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. The prior art interferometers have a temperature drift which causes inaccuracy and requirement for complicated packaging. According to the invention the interferometer arrangement has both an electrically tuneable interferometer and a reference interferometer on the same substrate. The temperature drift is measured with the reference interferometer and this information is used for compensating the measurement with the tuneable interferometer. The measurement accuracy and stability can thus be improved and requirements for packaging are lighter.

Patent family as of 12.10.2021
CN103487931 A 20140101 CN201310229267 20130608     
CN103487931B 20171114 CN201310229267 20130608      
DE602013058688D1 20190829 DE201360058688T 20130603      
EP2672243 A1 20131211 EP20130170194 20130603      
EP2672243 B1 20190807 EP20130170194 20130603      
FI125368 B 20150915 FI20120005629 20120608      
FI20125629 A 20131209 FI20120005629 20120608      
JP2013257561 A2 20131226 JP20130117205 20130603      
JP5512019 B2 20140604 JP20130117205 20130603      
US2013329232 AA 20131212 US20130911319 20130606      
US8654347 BB 20140218 US20130911319 20130606

Link to current patent family on right 

Original languageEnglish
Patent numberEP2672243
IPCG02B 26/ 00 A I
Priority date8/06/12
Publication statusPublished - 11 Dec 2013
MoE publication typeH1 Granted patent


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