Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same

Jarkko Antila (Inventor), Martti Blomberg (Inventor)

Research output: PatentPatent

Fingerprint

Dive into the research topics of 'Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same'. Together they form a unique fingerprint.

Engineering & Materials Science